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Reflective binary amplitude grating for soft x-ray shearing and Hartmann wavefront sensing

Journal Article · · Optics Letters
DOI:https://doi.org/10.1364/ol.398737· OSTI ID:1695758
 [1];  [1];  [1];  [2];  [1]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  2. A.M. Fitzgerald & Associates, LLC, Burlingame, CA (United States)
+ Show Author Affiliations
Here, we demonstrate a reflective wavefront sensor grating suitable for the characterization of high-quality x-ray beamlines and optical systems with high power densities. Operating at glancing incidence angles, the optical element is deeply etched with a two-level pattern of shearing interferometry gratings and Hartmann wavefront sensor grids. Transverse features block unwanted light, enabling binary amplitude in reflection with high pattern contrast. We present surface characterization and soft x-ray reflectometry of a prototype grating array to demonstrate function prior to wavefront measurement applications. A simulation of device performance is shown.
Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Grant/Contract Number:
AC02-05CH11231
OSTI ID:
1695758
Alternate ID(s):
OSTI ID: 1647893
Journal Information:
Optics Letters, Journal Name: Optics Letters Journal Issue: 17 Vol. 45; ISSN 0146-9592
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English

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journal May 2010
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Methodology for optimal in situ alignment and setting of bendable optics for nearly diffraction-limited focusing of soft x-rays journal March 2013
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Design and demonstration of tunable soft x-ray lateral shearing and Hartmann wavefront sensors conference September 2018
Wavefront measurement for a hard-X-ray nanobeam using single-grating interferometry journal January 2012
Probing transverse coherence of x-ray beam with 2-D phase grating interferometer journal January 2014
Hartmann wave-front measurement at 134 nm with λ_EUV/120 accuracy journal January 2003

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