On the Ohmic-dominant heating mode of capacitively coupled plasma inverted by boundary electron emission

Zhang, Shu; Sun, Guang-Yu; Chen, Jian; Sun, Hao-Min; Sun, An-Bang; Zhang, Guan-Jun

doi:10.1063/5.0096316

On the Ohmic-dominant heating mode of capacitively coupled plasma inverted by boundary electron emission

Journal Article · Tue Jul 05 00:00:00 EDT 2022 · Applied Physics Letters

DOI:https://doi.org/10.1063/5.0096316· OSTI ID:1889249

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Xi'an Jiaotong Univ., Shaanxi (China)
Ecole Polytechnique Federale Lausanne (EPFL) (Switzerland)
Sun Yat-Sen Univ., Guangzhou (China)
Princeton Plasma Physics Lab. (PPPL), Princeton, NJ (United States)

Electron emission from the boundary is ubiquitous in a capacitively coupled plasma (CCP) and precipitates nonnegligible influence on the discharge properties. Here, we present Particle-in-Cell/Monte Carlo Collision simulation of an Ohmic-dominant heating mode of the capacitively coupled plasma, where the stochastic heating vanishes and only Ohmic heating sustains the discharge due to sheath inversion by boundary electron emission. The inverted CCP features negative sheath potential without Bohm presheath, hence excluding plasma heating due to sheath edge oscillation. The particle and energy transport of the proposed heating mode is analyzed. The influence of boundary electron emission flux, source voltage, and neutral pressure on the transition between classic and Ohmic-dominant CCP heating modes is shown with designated simulation scans. Further, a modified inverse sheath–plasma coupling due to excessive ionization is discovered. In the end, key indicators of the proposed heating mode in plasma diagnostics are provided for future experimental verifications.

View Accepted Manuscript (DOE)

Research Organization:: Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)

Sponsoring Organization:: USDOE; National Natural Science Foundation of China (NSFC); National Key Research and Development Program of China

Grant/Contract Number:: AC02-09CH11466

OSTI ID:: 1889249

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 1 Vol. 121; ISSN 0003-6951

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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