Enhancement of Ohmic and Stochastic Heating by Resonance Effects in Capacitive Radio Frequency Discharges: A Theoretical Approach

Journal Article · Fri Aug 22 04:00:00 EDT 2008 · Physical Review Letters

DOI:https://doi.org/10.1103/PHYSREVLETT.101.085004· OSTI ID:21134158

Mussenbrock, T; Brinkmann, R P; Lieberman, M A; Lichtenberg, A J; Kawamura, E ^[1]

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1. Institute for Theoretical Electrical Engineering, Center for Plasma Science and Technology, Ruhr University Bochum, D-44780 Bochum (Germany)

In low-pressure capacitive radio frequency discharges, two mechanisms of electron heating are dominant: (i) Ohmic heating due to collisions of electrons with neutrals of the background gas and (ii) stochastic heating due to momentum transfer from the oscillating boundary sheath. In this work we show by means of a nonlinear global model that the self-excitation of the plasma series resonance which arises in asymmetric capacitive discharges due to nonlinear interaction of plasma bulk and sheath significantly affects both Ohmic heating and stochastic heating. We observe that the series resonance effect increases the dissipation by factors of 2-5. We conclude that the nonlinear plasma dynamics should be taken into account in order to describe quantitatively correct electron heating in asymmetric capacitive radio frequency discharges.

• OSTI ID: 21134158
• Journal Information: Physical Review Letters, Journal Name: Physical Review Letters Journal Issue: 8 Vol. 101; ISSN 0031-9007; ISSN PRLTAO
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ASYMMETRY
ELECTRONS
EXCITATION
HEATING
MOMENTUM TRANSFER
NONLINEAR PROBLEMS
PLASMA
RADIOWAVE RADIATION
RESONANCE
STOCHASTIC PROCESSES