The effects of nonlinear series resonance on Ohmic and stochastic heating in capacitive discharges
- Department of Electrical Engineering and Computer Science-1770, University of California, Berkeley, California 94720 (United States)
- Lehrstuhl fuer Theoretische Elektrotechnik, Ruhr-Universitaet Bochum, D44801 Bochum (Germany)
The flow of electron and ion conduction currents across a nonlinear capacitive sheath to the electrode surface self-consistently sets the dc bias voltage across the sheath. We incorporate these currents into a model of a homogeneous capacitive sheath in order to determine the enhancement of the Ohmic and stochastic heating due to self-excitation of the nonlinear series resonance in an asymmetric capacitive discharge. At lower pressures, the series resonance can enhance both the Ohmic and stochastic heating by factors of 2-4, with the Ohmic heating tending to zero as the pressure decreases. The model was checked, for a particular set of parameters, by a particle-in-cell (PIC) simulation using the homogeneous sheath approximation, giving good agreement. With a self-consistent Child-law sheath, the PIC simulation showed increased heating, as expected, whether the series resonance is important or not.
- OSTI ID:
- 21120464
- Journal Information:
- Physics of Plasmas, Vol. 15, Issue 6; Other Information: DOI: 10.1063/1.2928847; (c) 2008 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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