The response of a capacitively coupled discharge to the formation of dust particles: Experiments and modeling
- School of Physics and Technology, V. N. Karazin Kharkiv National University, Svobody sq. 4, 61077 Kharkiv (Ukraine)
The influence of dust particles on the properties of a capacitively coupled Ar-C{sub 2}H{sub 2} discharge is studied both experimentally and theoretically. The results of measurements of the intensity and spatial distribution of the emitted light, the line width of the fast component of H{sub {alpha}} line and of the electron density during the particle growth are presented. To analyze the experimental results a one-dimensional discharge model is developed. Using the model the effects of dust grains on the power absorption (taking into account stochastic and Ohmic heating in the plasma sheaths), the optical emission intensity profile, the sheath size, the rf electric field and on the energy of positive ions bombarding the electrodes are investigated. In particular, it is shown that the decrease of the power absorption in the sheaths of complex plasmas is due to the dependence of the stochastic and Ohmic heating in the plasma sheaths on the electron temperature and the current flowing across the discharge plates. The results of the calculations are compared with the available experimental data and found to be in good agreement.
- OSTI ID:
- 20860153
- Journal Information:
- Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 7 Vol. 13; ISSN PHPAEN; ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ABSORPTION
ACETYLENE
ARGON
CATIONS
COMPUTERIZED SIMULATION
DUSTS
ELECTRIC CURRENTS
ELECTRIC FIELDS
ELECTRODES
ELECTRON DENSITY
ELECTRON TEMPERATURE
EMISSION
HIGH-FREQUENCY DISCHARGES
ION TEMPERATURE
LINE WIDTHS
PLASMA
PLASMA DENSITY
PLASMA SHEATH
PLASMA SIMULATION
RADIATION TRANSPORT
SPATIAL DISTRIBUTION
VISIBLE RADIATION