The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors

Lacey, Ian; Anderson, Kevan; Centers, Gary P.; Geckeler, Ralf D.; Gevorkyan, Gevork S.; Grossiord, John; Just, Andreas; Nicolot, Theo; Smith, Brian V.; Yashchuk, Valeriy V.

doi:10.1117/12.2321347

The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors

Journal Article · Mon Sep 17 00:00:00 EDT 2018 · Proceedings of SPIE - The International Society for Optical Engineering

DOI:https://doi.org/10.1117/12.2321347· OSTI ID:1887188

Lacey, Ian ^[1]; Anderson, Kevan ^[1]; Centers, Gary P. ^[2]; Geckeler, Ralf D. ^[3]; Gevorkyan, Gevork S. ^[1]; Grossiord, John ^[4]; Just, Andreas ^[3]; Nicolot, Theo ^[4]; Smith, Brian V. ^[1]; Yashchuk, Valeriy V. ^[1]

Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States); Helmholtz Institute, Mainz (Germany)
Physikalisch-Technische Bundesanstalt, Braunschweig (Germany)
University Institute of Technology Creusot (France)

We report that to preserve the brightness and coherence of x-rays produced by diffraction-limited-storage-ring (DLSR) and free-electron laser (FEL) light sources, beamline optics must have unprecedented quality. For example, in the case of the most advanced beamlines for the DLSR source under development at the Advanced Light Source (ALS), the ALS-U, we need highly curved x-ray mirrors with surface slope tolerances better than 50-100 nrad (root-mean-square, rms). At the ALS X-Ray Optics Lab (XROL), we are working on the development of a new Optical Surface Measuring System (OSMS) with the required measurement accuracy. The OSMS is capable for the two-dimensional (2D) surface slope metrology over the spatial range from the sub-mm scale to the clear aperture. Usage of different arrangements of the OSMS sensors allows measuring the mirrors in the face-up or side-facing orientation, corresponding to the beamline application. The OSMS translation system and data acquisition software are designed to support multi scan measurement runs optimized for automatic suppression and compensation of instrumental drifts and major angular and spatial systematic errors. Here, we discuss the recent results of the OSMS research and development project. We provide details of the OSMS design and describe results of experimental performance tests of the gantry system. In particular, we show that the system is capable for measurement repeatability with strongly curved mirrors on the level of 20 nrad (rms). The high angular resolution of the OSMS rotational tip-tilt stage is adequate for implementation of instrumental calibration with using the mirror under test as a reference. The achieved measuring accuracy is demonstrated via comparison to metrology with the carefully calibrated Developmental Long Trace Profiler, also available at the XROL.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1887188

Journal Information:: Proceedings of SPIE - The International Society for Optical Engineering, Journal Name: Proceedings of SPIE - The International Society for Optical Engineering Vol. 10760; ISSN 0277-786X

Publisher:: SPIECopyright Statement

Country of Publication:: United States

Language:: English

References (36)

The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability Alcock, S. G.; Sawhney, K. J. S.; Scott, S. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3 https://doi.org/10.1016/j.nima.2009.10.137	journal	May 2010
Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler Yashchuk, Valeriy V.; Barber, Samuel; Domning, Edward E. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3 https://doi.org/10.1016/j.nima.2009.10.175	journal	May 2010
A stitching figure profiler of large X-ray mirrors using RADSI for subaperture data acquisition Kimura, Takashi; Ohashi, Haruhiko; Mimura, Hidekazu Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3 https://doi.org/10.1016/j.nima.2009.11.014	journal	May 2010
Autocollimators for deflectometry: Current status and future progress Geckeler, Ralf D.; Just, Andreas; Krause, Michael Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3 https://doi.org/10.1016/j.nima.2009.11.021	journal	May 2010
Upgrade of long trace profiler for characterization of high-precision X-ray mirrors at SPring-8 Senba, Y.; Kishimoto, H.; Ohashi, H. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3 https://doi.org/10.1016/j.nima.2009.12.007	journal	May 2010
Performance of the APS optical slope measuring system Qian, Jun; Sullivan, Joe; Erdmann, Mark Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 710 https://doi.org/10.1016/j.nima.2012.10.102	journal	May 2013
Investigations on the spatial resolution of autocollimator-based slope measuring profilers Siewert, F.; Buchheim, J.; Höft, T. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 710 https://doi.org/10.1016/j.nima.2012.10.130	journal	May 2013
Development of a high-performance gantry system for a new generation of optical slope measuring profilers Assoufid, Lahsen; Brown, Nathan; Crews, Dan Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 710 https://doi.org/10.1016/j.nima.2012.11.063	journal	May 2013
Comparison of angle standards with the aid of a high-resolution angle encoder Just, A.; Krause, M.; Probst, R. Precision Engineering, Vol. 33, Issue 4 https://doi.org/10.1016/j.precisioneng.2009.02.004	journal	October 2009
Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining Yamauchi, Kazuto; Mimura, Hidekazu; Inagaki, Kouji Review of Scientific Instruments, Vol. 73, Issue 11 https://doi.org/10.1063/1.1510573	journal	November 2002
Microstitching interferometry for x-ray reflective optics Yamauchi, Kazuto; Yamamura, Kazuya; Mimura, Hidekazu Review of Scientific Instruments, Vol. 74, Issue 5 https://doi.org/10.1063/1.1569405	journal	May 2003
Technique for measuring the groove density of diffraction gratings using the long trace profiler Cocco, D.; Sostero, G.; Zangrando, M. Review of Scientific Instruments, Vol. 74, Issue 7 https://doi.org/10.1063/1.1584080	journal	July 2003
Relative angle determinable stitching interferometry for hard x-ray reflective optics Mimura, Hidekazu; Yumoto, Hirokatsu; Matsuyama, Satoshi Review of Scientific Instruments, Vol. 76, Issue 4 https://doi.org/10.1063/1.1868472	journal	April 2005
Optimal measurement strategies for effective suppression of drift errors Yashchuk, Valeriy V. Review of Scientific Instruments, Vol. 80, Issue 11 https://doi.org/10.1063/1.3249559	journal	November 2009
High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments Yashchuk, Valeriy V.; Artemiev, Nikolay A.; Centers, Gary Review of Scientific Instruments, Vol. 87, Issue 5 https://doi.org/10.1063/1.4950729	journal	May 2016
Aperture alignment in autocollimator-based deflectometric profilometers Geckeler, R. D.; Artemiev, N. A.; Barber, S. K. Review of Scientific Instruments, Vol. 87, Issue 5 https://doi.org/10.1063/1.4950734	journal	May 2016
Linear chirped slope profile for spatial calibration in slope measuring deflectometry Siewert, F.; Zeschke, T.; Arnold, T. Review of Scientific Instruments, Vol. 87, Issue 5 https://doi.org/10.1063/1.4950737	journal	May 2016
Metrology for the Advancement of X-ray Optics at the ALS Goldberg, Kenneth A.; Yashchuk, Valeriy V.; Artemiev, Nikolay A. Synchrotron Radiation News, Vol. 26, Issue 5 https://doi.org/10.1080/08940886.2013.832583	journal	September 2013
Calibration of high-resolution electronic autocollimators against an angle comparator Just, A.; Krause, M.; Probst, R. Metrologia, Vol. 40, Issue 5 https://doi.org/10.1088/0026-1394/40/5/011	journal	September 2003
Capabilities and limitations of the self-calibration of angle encoders Geckeler, Ralf D.; Link, Alfred; Krause, Michael Measurement Science and Technology, Vol. 25, Issue 5 https://doi.org/10.1088/0957-0233/25/5/055003	journal	March 2014
The new PTB angle comparator Probst, R.; Wittekopf, R.; Krause, M. Measurement Science and Technology, Vol. 9, Issue 7 https://doi.org/10.1088/0957-0233/9/7/009	journal	July 1998
On the characterization of ultra-precise X-ray optical components: advances and challenges in ex situ metrology Siewert, F.; Buchheim, J.; Zeschke, T. Journal of Synchrotron Radiation, Vol. 21, Issue 5 https://doi.org/10.1107/S1600577514016221	journal	August 2014
Developmental long-trace profiler using optimally aligned mirror-based pentaprism Barber, Samuel K. Optical Engineering, Vol. 50, Issue 5 https://doi.org/10.1117/1.3572113	journal	May 2011
Optimal alignment of mirror-based pentaprisms for scanning deflectometric devices Geckeler, Ralf D. Optical Engineering, Vol. 50, Issue 7 https://doi.org/10.1117/1.3598325	journal	July 2011
Advanced environmental control as a key component in the development of ultrahigh accuracy ex situ metrology for x-ray optics Yashchuk, Valeriy V.; Artemiev, Nikolay A.; Lacey, Ian Optical Engineering, Vol. 54, Issue 10 https://doi.org/10.1117/1.OE.54.10.104104	journal	October 2015
Specification of x-ray mirrors in terms of system performance: new twist to an old plot Yashchuk, Valeriy V.; Samoylova, Liubov V.; Kozhevnikov, Igor V. Optical Engineering, Vol. 54, Issue 2 https://doi.org/10.1117/1.OE.54.2.025108	journal	February 2015
The developmental long trace profiler (DLTP) optimized for metrology of side-facing optics at the ALS Lacey, Ian; Artemiev, Nikolay A.; Domning, Edward E. SPIE Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.2061969	conference	September 2014
A new x-ray optics laboratory (XROL) at the ALS: mission, arrangement, metrology capabilities, performance, and future plans Yashchuk, Valeriy V.; Artemiev, Nikolay A.; Lacey, Ian SPIE Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.2062042	conference	September 2014
Nanometer accuracy with continuous scans at the ALBA-NOM Nicolas, Josep; Pedreira, Pablo; Šics, Igors SPIE Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.2238128	conference	September 2016
Innovative nano-accuracy surface profiler for sub-50 nrad rms mirror test Qian, Shinan; Idir, Mourad Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), SPIE Proceedings https://doi.org/10.1117/12.2247575	conference	October 2016
Metrology of variable-line-spacing x-ray gratings using the APS Long Trace Profiler Qian, Jun; Manton, Jonathan; Bean, Sunil Advances in Metrology for X-Ray and EUV Optics VII https://doi.org/10.1117/12.2279053	conference	September 2017
Air convection noise of pencil-beam interferometer for long trace profiler Yashchuk, Valeriy V.; Irick, Steve C.; MacDowell, Alastair A. SPIE Optics + Photonics, SPIE Proceedings https://doi.org/10.1117/12.681297	conference	August 2006
Proposal for a universal test mirror for characterization of slope measuring instruments Yashchuk, Valeriy V.; McKinney, Wayne R.; Warwick, Tony Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.732719	conference	September 2007
Microstitching interferometer and relative angle determinable stitching interferometer for half-meter-long x-ray mirror Ohashi, Haruhiko; Tsumura, Takashi; Okada, Hiromi Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.733476	conference	September 2007
Automated suppression of errors in LTP-II slope measurements with x-ray optics Ali, Zulfiqar; Artemiev, Nikolay A.; Cummings, Curtis L. SPIE Optical Engineering + Applications, SPIE Proceedings https://doi.org/10.1117/12.894061	conference	September 2011
A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head Idir, Mourad; Kaznatcheev, Konstantine; Dovillaire, Guillaume Optics Express, Vol. 22, Issue 3 https://doi.org/10.1364/OE.22.002770	journal	January 2014

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The ALS OSMS: Optical Surface Measuring System for high accuracy two-dimensional slope metrology with state-of-the-art x-ray mirrors

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