Development of a New Generation of Optical Slope Measuring Profiler

Journal Article · Wed Oct 26 04:00:00 EDT 2011 · Nuclear Instruments and Methods

DOI:https://doi.org/10.1016/j.nima.2010.10.063· OSTI ID:1034718

Yashchuk, V V; Takacs, P; McKinney, W R; Assoufid, L; Siewert, F; Zeschke, T

A collaboration including all DOE synchrotron laboratories and industrial vendors of X-ray optics, and with active participation of the HBZ-BESSY-II optics group, has been established to work together on a new slope measuring profiler - the Optical Slope Measuring System (OSMS). The slope measurement accuracy of the instrument is expected to be <50 nrad for the current and future metrology of X-ray optics for the next generation of light sources. The goals were to solidify a design that meets the needs of mirror specifications and also be affordable, and to create a common specification for fabrication of a multi-functional translation/scanning (MFTS) system for the OSMS. This was accomplished by two collaborative meetings at the ALS (March 26, 2010) and at the APS (May 6, 2010).

• Research Organization: BROOKHAVEN NATIONAL LABORATORY (BNL)
• Sponsoring Organization: USDOE SC OFFICE OF SCIENCE (SC)
• DOE Contract Number: AC02-98CH10886
• OSTI ID: 1034718
• Report Number(s): BNL--96417-2011-JA; KA-04
• Journal Information: Nuclear Instruments and Methods, Journal Name: Nuclear Instruments and Methods Journal Issue: 1 Vol. 649; ISSN NUIMAL; ISSN 0029-554X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ACCURACY
DESIGN
FABRICATION
LIGHT SOURCES
MIRRORS
OPTICS
SPECIFICATIONS
SYNCHROTRONS