Development of a new generation of optical slope measuring profiler
Conference
·
OSTI ID:985915
We overview the results of a broad US collaboration, including all DOE synchrotron labs (ALS, APS, BNL, NSLS-II, LLNL, LCLS), major industrial vendors of x-ray optics (InSync, Inc., SSG Precision Optronics-Tinsley, Inc., Optimax Systems, Inc.), and with active participation of HBZ-BESSY-II optics group, on development of a new generation slope measuring profiler -- the optical slope measuring system (OSMS). The desired surface slope measurement accuracy of the instrument is<50 nrad (absolute) that is adequate to the current and foreseeable future needs for metrology of x-ray optics for the next generation of light sources.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
- Sponsoring Organization:
- Advanced Light Source Division
- DOE Contract Number:
- AC02-05CH11231
- OSTI ID:
- 985915
- Report Number(s):
- LBNL-3725E-Ext-Abs
- Country of Publication:
- United States
- Language:
- English
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