Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach
In a previous paper, the University of Arizona (UA) has developed a measurement technique called: Software Configurable Optical Test System (SCOTS) based on the principle of reflection deflectometry. In this paper, we present results of this very efficient optical metrology method applied to the metrology of X-ray mirrors. We used this technique to measure surface slope errors with precision and accuracy better than 100 nrad (rms) and {approx}200 nrad (rms), respectively, with a lateral resolution of few mm or less. We present results of the calibration of the metrology systems, discuss their accuracy and address the precision in measuring a spherical mirror.
- Research Organization:
- Brookhaven National Laboratory (BNL) National Synchrotron Light Source
- Sponsoring Organization:
- USDOE SC OFFICE OF SCIENCE (SC)
- DOE Contract Number:
- AC02-98CH10886
- OSTI ID:
- 1049291
- Report Number(s):
- BNL--98277-2012-JA; 39KC02000
- Journal Information:
- Optics Express, Journal Name: Optics Express Journal Issue: 11 Vol. 20; ISSN 1094-4087
- Country of Publication:
- United States
- Language:
- English
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