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U.S. Department of Energy
Office of Scientific and Technical Information

FAIR DEAL Grand Challenge Overview

Technical Report ·
DOI:https://doi.org/10.2172/1854733· OSTI ID:1854733
While it is likely practically a bad idea to shrink a transistor to the size of an atom, there is no arguing that it would be fantastic to have atomic-scale control over every aspect of a transistor – a kind of crystal ball to understand and evaluate new ideas. This project showed that it was possible to take a niche technique used to place dopants in silicon with atomic precision and apply it broadly to study opportunities and limitations in microelectronics. In addition, it laid the foundation to attaining atomic-scale control in semiconductor manufacturing more broadly.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525
OSTI ID:
1854733
Report Number(s):
SAND2021-12085; 700399
Country of Publication:
United States
Language:
English

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