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Engineering quantum-coherent defects: The role of substrate miscut in chemical vapor deposition diamond growth

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/5.0029715· OSTI ID:1852955
 [1];  [2];  [3];  [4];  [3];  [3];  [4]
  1. Univ. of California, Santa Barbara, CA (United States). Dept. of Physics; Univ. of California, Santa Barbara, CA (United States)
  2. Stanford Univ., CA (United States). Dept. of Materials Science and Engineering
  3. Univ. of California, Santa Barbara, CA (United States). Dept. of Physics. Materials Department
  4. Univ. of California, Santa Barbara, CA (United States). Dept. of Physics

The engineering of defects in diamond, particularly nitrogen-vacancy (NV) centers, is important for many applications in quantum science. A materials science approach based on chemical vapor deposition (CVD) growth of diamond and in situ nitrogen doping is a promising path toward tuning and optimizing the desired properties of the embedded defects. Herein, with the coherence of the embedded defects in mind, we explore the effects of substrate miscut on the diamond growth rate, nitrogen density, and hillock defect density, and we report an optimal angle range for the purposes of engineering coherent ensembles of NV centers in diamond according to our growth parameters. We provide a model that quantitatively describes hillock nucleation in the step-flow regime of CVD growth, shedding insight on the physics of hillock formation. We also report significantly enhanced incorporation of nitrogen at hillock defects, opening the possibility for templating hillock-defect-localized NV center ensembles for quantum applications.

Research Organization:
Univ. of California, Santa Barbara, CA (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF); Natural Sciences and Engineering Research Council of Canada (NSERC)
Grant/Contract Number:
SC0019241
OSTI ID:
1852955
Alternate ID(s):
OSTI ID: 1712813
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 19 Vol. 117; ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English

References (34)

Influence of substrate misorientation on the surface morphology of homoepitaxial diamond (111) films: Surface morphology of homoepitaxial diamond (111) films journal March 2016
NV-Center Formation in Single Crystal Diamond at Different CVD Growth Conditions journal September 2018
SIMS quantification in Si, GaAs, and diamond - an update journal May 1995
Device-grade homoepitaxial diamond film growth journal April 2002
Diamond films epitaxially grown by step-flow mode journal January 1998
Origin of growth defects in CVD diamond epitaxial films journal January 2008
Influence of CVD diamond growth conditions on nitrogen incorporation journal February 2017
Misorientation-angle dependence of boron incorporation into (001)-oriented chemical-vapor-deposited (CVD) diamond journal February 2011
Patterned Formation of Highly Coherent Nitrogen-Vacancy Centers Using a Focused Electron Irradiation Technique journal March 2016
Optical and Spin Coherence Properties of Nitrogen-Vacancy Centers Placed in a 100 nm Thick Isotopically Purified Diamond Layer journal January 2012
Coherent Optical Transitions in Implanted Nitrogen Vacancy Centers journal March 2014
Controlling the coherence of a diamond spin qubit through its strain environment journal May 2018
Quantum technologies with optically interfaced solid-state spins journal August 2018
Behavior and mechanism of step bunching during metalorganic vapor phase epitaxy of GaAs journal April 1995
Engineering shallow spins in diamond with nitrogen delta-doping journal August 2012
Toward highly conductive n-type diamond: Incremental phosphorus-donor concentrations assisted by surface migration of admolecules journal October 2016
Chemical vapour deposition diamond single crystals with nitrogen-vacancy centres: a review of material synthesis and technology for quantum sensing applications journal May 2020
Understanding the chemical vapor deposition of diamond: recent progress journal August 2009
Topical review: spins and mechanics in diamond journal February 2017
Diamond optomechanical crystals with embedded nitrogen-vacancy centers journal March 2019
Probing Surface Noise with Depth-Calibrated Spins in Diamond journal July 2014
Improving a Solid-State Qubit through an Engineered Mesoscopic Environment journal September 2017
Identifying and Mitigating Charge Instabilities in Shallow Diamond Nitrogen-Vacancy Centers journal February 2019
Optimizing the formation of depth-confined nitrogen vacancy center spin ensembles in diamond for quantum sensing journal November 2019
Quantum Metrology with Strongly Interacting Spin Systems journal July 2020
Measurement and Control of Single Nitrogen-Vacancy Center Spins above 600 K journal July 2012
Single-Crystal Diamond Nanobeam Waveguide Optomechanics journal December 2015
Quantum Information Storage for over 180 s Using Donor Spins in a 28Si "Semiconductor Vacuum" journal June 2012
Quantum Spintronics: Engineering and Manipulating Atom-Like Spins in Semiconductors journal March 2013
Hillock-Free Heavily Boron-Doped Homoepitaxial Diamond Films on Misoriented (001) Substrates journal April 2007
Single-crystal diamond low-dissipation cavity optomechanics journal January 2016
Diamond optomechanical crystals journal January 2016
Diamond optomechanical crystals collection January 2016
Single-crystal diamond low-dissipation cavity optomechanics collection January 2016

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