Electron ptychography achieves atomic-resolution limits set by lattice vibrations

Chen, Zhen; Jiang, Yi; Shao, Yu-Tsun; Holtz, Megan E.; Odstrčil, Michal; Guizar-Sicairos, Manuel; Hanke, Isabelle; Ganschow, Steffen; Schlom, Darrell G.; Muller, David A.

doi:10.1126/science.abg2533

Electron ptychography achieves atomic-resolution limits set by lattice vibrations

Journal Article · Fri May 21 00:00:00 EDT 2021 · Science

DOI:https://doi.org/10.1126/science.abg2533· OSTI ID:1840900

^[1]; ^[2]; Shao, Yu-Tsun ^[1]; ^[3]; ^[4]; ^[5]; Hanke, Isabelle ^[6]; ^[6]; ^[7]; ^[8]

Cornell Univ., Ithaca, NY (United States)
Argonne National Lab. (ANL), Lemont, IL (United States)
Cornell Univ., Ithaca, NY (United States); Colorado School of Mines, Golden, CO (United States)
Paul Scherrer Inst. (PSI), Villigen (Switzerland); Carl Zeiss SMT, Oberkochen (Germany)
Paul Scherrer Inst. (PSI), Villigen (Switzerland)
Leibniz-Inst. für Kristallzüchtung, Berlin (Germany)
Cornell Univ., Ithaca, NY (United States); Leibniz-Inst. für Kristallzüchtung, Berlin (Germany); Kavli Institute at Cornell for Nanoscale Science, Ithaca, NY (United States)
Cornell Univ., Ithaca, NY (United States); Kavli Institute at Cornell for Nanoscale Science, Ithaca, NY (United States)

Transmission electron microscopes use electrons with wavelengths of a few picometers, potentially capable of imaging individual atoms in solids at a resolution ultimately set by the intrinsic size of an atom. However, owing to lens aberrations and multiple scattering of electrons in the sample, the image resolution is reduced by a factor of 3 to 10. By inversely solving the multiple scattering problem and overcoming the electron-probe aberrations using electron ptychography, we demonstrate an instrumental blurring of less than 20 picometers and a linear phase response in thick samples. The measured widths of atomic columns are limited by thermal fluctuations of the atoms. As a result, our method is also capable of locating embedded atomic dopant atoms in all three dimensions with subnanometer precision from only a single projection measurement.

View Accepted Manuscript (DOE)

Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: National Science Foundation (NSF); USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1840900

Journal Information:: Science, Journal Name: Science Journal Issue: 6544 Vol. 372; ISSN 0036-8075

Publisher:: AAASCopyright Statement

Country of Publication:: United States

Language:: English

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Dataset: Electron ptychography achieves atomic-resolution limits set by lattice vibrations Chen, Zhen; Jiang, Yi; Shao1, Yu-Tsun PARADIM, an NSF Materials Innovation Platform https://doi.org/10.34863/ssmm-2j11	dataset	January 2021

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