Ultrasound effects on the tribological properties of synthesized diamond films

Journal Article · Fri Sep 01 04:00:00 EDT 1995 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena

OSTI ID:183584

Snikta, V ^[1]; Trava-Airoldi, V J ^[2]; Baranauskas, V ^[3]

---

1. Research Institute, Kaunas (Lithuania)
2. INPE, Sao Jose dos Campos (Brazil)
3. State Univ. of Campinas (Brazil)

The friction and wear behavior of chemical vapor deposition grown diamond films has been investigated under strong ultrasound conditions at the friction interface. Experiments were performed on an alternating {open_quotes}pin-on-plate{close_quotes} tribometer constructed as an ultrasonic motor with excited bimodal mechanical vibrations at the frequency of 20 kHz. Ultrasound sliding of the films was done against alumina ceramics and with the diamond film itself. We have shown that chemical vapor deposition diamond films can be fast polished mechanically without significant graphitization by ultrasonic treatment. The initial film roughness was reduced from an average R{sub a} {approximately}3000 nm to R{sub a} {approximately}10 nm. The polishing decreased the static coefficient of friction of the diamond film from about 0.53 to about 0.12. The operative mechanism for the polishing in the case of initially rough diamond samples appears to be asperity fracture. For smooth diamond samples it is suggested that tribochemical oxidation is also a polishing mechanism. 17 refs., 8 figs.

• OSTI ID: 183584
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 5 Vol. 13; ISSN JVTBD9; ISSN 0734-211X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
66 PHYSICS
CHEMICAL VAPOR DEPOSITION
DIAMONDS
THIN FILMS
TRIBOLOGY
ULTRASONIC TESTING