Photoabsorption Imaging at Nanometer Scales Using Secondary Electron Analysis

Zhang, Ze; Martis, Joel; Xu, Xintong; Li, Hao-Kun; Xie, Chenlu; Takasuka, Brad; Lee, Jonghoon; Roy, Ajit K.; Majumdar, Arun

doi:10.1021/acs.nanolett.0c03993

Photoabsorption Imaging at Nanometer Scales Using Secondary Electron Analysis

Journal Article · Thu Feb 25 23:00:00 EST 2021 · Nano Letters

DOI:https://doi.org/10.1021/acs.nanolett.0c03993· OSTI ID:1782083

^[1]; Martis, Joel ^[1]; Xu, Xintong ^[1]; Li, Hao-Kun ^[1]; Xie, Chenlu ^[1]; Takasuka, Brad ^[2]; Lee, Jonghoon ^[3]; Roy, Ajit K. ^[3]; ^[4]

Stanford Univ., CA (United States)
Silicon Valley Peripherals Inc., San Jose, CA (United States)
Air Force Research Lab. (AFRL), Wright-Patterson AFB, OH (United States)
Stanford Univ., CA (United States); Stanford Univ., CA (United States). Precourt Inst. for Energy; SLAC National Accelerator Lab., Menlo Park, CA (United States)

Optical imaging with nanometer resolution offers fundamental insights into light–matter interactions. Traditional optical techniques are diffraction limited with a spatial resolution >100 nm. Optical super-resolution and cathodoluminescence techniques have higher spatial resolutions, but these approaches require the sample to fluoresce, which many materials lack. Here, we introduce photoabsorption microscopy using electron analysis, which involves spectrally specific photoabsorption that is locally probed using a scanning electron microscope, whereby a photoabsorption-induced surface photovoltage modulates the secondary electron emission. We demonstrate spectrally specific photoabsorption imaging with sub-20 nm spatial resolution using silicon, germanium, and gold nanoparticles. Theoretical analysis and Monte Carlo simulations are used to explain the basic trends of the photoabsorption-induced secondary electron signal. Based on our current experiments and this analysis, we expect that the spatial resolution can be further improved to a few nanometers, thereby offering a general approach for nanometer-scale optical spectroscopic imaging and material characterization.

View Accepted Manuscript (DOE)

Research Organization:: SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); US Air Force Office of Scientific (AFOSR); National Science Foundation (NSF)

Grant/Contract Number:: AC02-76SF00515; SC0019112

OSTI ID:: 1782083

Journal Information:: Nano Letters, Journal Name: Nano Letters Journal Issue: 5 Vol. 21; ISSN 1530-6984

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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