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Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques.

Conference ·
DOI:https://doi.org/10.1117/12.2551455· OSTI ID:1768141

Abstract not provided.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1768141
Report Number(s):
SAND2020-2400C; 684260
Resource Relation:
Conference: Proposed for presentation at the SPIE Advanced Lithography.
Country of Publication:
United States
Language:
English

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