Commercialization of Micro-fabrication of Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Studies of the Cosmic Microwave Background

Journal Article · Mon Apr 09 00:00:00 EDT 2018 · Journal of Low Temperature Physics

DOI:https://doi.org/10.1007/s10909-018-1903-6· OSTI ID:1656479

Suzuki, Aritoki  ^[1]; Bebek, Chris ^[1]; Garcia-Sciveres, Maurice ^[1]; Holland, Stephen ^[1]; Kusaka, Akito ^[2]; Lee, Adrian T. ^[3]; Palaio, Nicholas ^[1]; Roe, Natalie ^[1]; Steinmetz, Leo ^[4]

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1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Univ. of Tokyo (Japan)
3. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Univ. of California, Berkeley, CA (United States); Univ. of California, Berkeley, CA (United States). Radio Astronomy Lab.
4. Univ. of California, Berkeley, CA (United States)

In this work, we report on the development of commercially fabricated multichroic antenna-coupled transition edge sensor (TES) bolometer arrays for cosmic microwave background (CMB) polarimetry experiments. CMB polarimetry experiments have deployed instruments in stages. Additionally, stage II experiments deployed with O(1000) detectors and reported successful detection of B-mode (divergence-free) polarization pattern in the CMB. Stage III experiments have recently started observing with O(10,000) detectors with wider frequency coverage. A concept for a stage IV experiment, CMB-S4, is emerging to make a definitive measurement of CMB polarization from the ground with O(400,000) detectors. The orders of magnitude increase in detector count for CMB-S4 require a new approach in detector fabrication to increase fabrication throughput and reduce the cost. We report on collaborative efforts with two commercial micro-fabrication foundries to fabricate antenna-coupled TES bolometer detectors. The detector design is based on the sinuous antenna-coupled dichroic detector from the POLARBEAR-2 experiment. The TES bolometers showed the expected I–V response, and the RF performance agrees with the simulation. We will discuss the motivation, design consideration, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments.

• Research Organization: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
• Sponsoring Organization: USDOE Office of Science (SC); USDOE Laboratory Directed Research and Development (LDRD) Program
• Grant/Contract Number: AC02-05CH11231
• OSTI ID: 1656479
• Journal Information: Journal of Low Temperature Physics, Vol. 193, Issue 5-6; ISSN 0022-2291
• Publisher: Springer
• Country of Publication: United States
• Language: English

Related Subjects

79 ASTRONOMY AND ASTROPHYSICS
Cosmic microwave background
TES bolometer
micro-fabrication
inflation
polarization
B-mode