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Commercially Fabricated Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Next-Generation Cosmic Microwave Background Polarimetry Experiment

Journal Article · · Journal of Low Temperature Physics
 [1];  [2];  [3];  [2];  [4];  [5];  [6];  [2];  [5];  [2];  [5];  [4];  [5]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Lawrence Berkeley National Laboratory
  2. Cornell Univ., Ithaca, NY (United States)
  3. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Univ. of California, Berkeley, CA (United States)
  4. Univ. of California, Berkeley, CA (United States). Radio Astronomy Lab.
  5. SeeQC, Inc., Elmsford, NY (United States)
  6. Univ. of California, Berkeley, CA (United States)
+ Show Author Affiliations

We report on the development of commercially fabricated multi-chronic antenna-coupled transition edge sensor (TES) bolometer arrays for cosmic microwave background (CMB) polarimetry experiments. The orders of magnitude increase in detector count for next-generation CMB experiments require a new approach in detector wafer production to increase fabrication throughput. Here, we describe collaborative efforts with a commercial superconductor electronics fabrication facility (SeeQC, Inc.) to fabricate antenna-coupled TES bolometer detectors. We have successfully fabricated an operational dual-polarization, dichroic sinuous antenna-coupled TES detector array on a 150-mm-diameter wafer. The fabricated detector arrays have average yield of 95% and excellent uniformity across the wafer. Both RF characteristics and TES bolometer properties are suitable for CMB observations. We successfully fabricated different types of TES bolometers optimized for frequency multiplexing readout, time-domain multiplexing readout, and microwave SQUID multiplexing readout. We also demonstrated high production throughput. We discuss the motivation, design considerations, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments.

Research Organization:
SeeQC, Inc., Elmsford, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), High Energy Physics (HEP)
Grant/Contract Number:
SC0017818
OSTI ID:
1742085
Journal Information:
Journal of Low Temperature Physics, Journal Name: Journal of Low Temperature Physics Journal Issue: 3-4 Vol. 199; ISSN 0022-2291
Publisher:
SpringerCopyright Statement
Country of Publication:
United States
Language:
English

References (6)

AlMn Transition Edge Sensors for Advanced ACTPol journal February 2016
Commercialization of Micro-fabrication of Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Studies of the Cosmic Microwave Background journal April 2018
The POLARBEAR-2 and Simons Array Focal Plane Fabrication Status journal September 2018
Optimization study for the experimental configuration of CMB-S4 journal February 2018
Optimization Study for the Experimental Configuration of CMB-S4 text January 2017
Commercialization of micro-fabrication of antenna-coupled Transition Edge Sensor bolometer detectors for studies of the Cosmic Microwave Background text January 2018

Cited By (3)

Updated Design of the CMB Polarization Experiment Satellite LiteBIRD journal January 2020
Updated Design of the CMB Polarization Experiment Satellite LiteBIRD text January 2020
Updated Design of the CMB Polarization Experiment Satellite LiteBIRD text January 2020

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Related Subjects

47 OTHER INSTRUMENTATION
79 ASTRONOMY AND ASTROPHYSICS
Bolometers
Cosmic Microwave Background
Fabrication
TES bolometer
Technology Transfer
Transition edge sensors