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Title: Commercialization of Micro-fabrication of Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Studies of the Cosmic Microwave Background

Abstract

In this work, we report on the development of commercially fabricated multichroic antenna-coupled transition edge sensor (TES) bolometer arrays for cosmic microwave background (CMB) polarimetry experiments. CMB polarimetry experiments have deployed instruments in stages. Additionally, stage II experiments deployed with O(1000) detectors and reported successful detection of B-mode (divergence-free) polarization pattern in the CMB. Stage III experiments have recently started observing with O(10,000) detectors with wider frequency coverage. A concept for a stage IV experiment, CMB-S4, is emerging to make a definitive measurement of CMB polarization from the ground with O(400,000) detectors. The orders of magnitude increase in detector count for CMB-S4 require a new approach in detector fabrication to increase fabrication throughput and reduce the cost. We report on collaborative efforts with two commercial micro-fabrication foundries to fabricate antenna-coupled TES bolometer detectors. The detector design is based on the sinuous antenna-coupled dichroic detector from the POLARBEAR-2 experiment. The TES bolometers showed the expected I–V response, and the RF performance agrees with the simulation. We will discuss the motivation, design consideration, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments.

Authors:
ORCiD logo [1];  [1];  [1];  [1];  [2];  [3];  [1];  [1];  [4]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Univ. of Tokyo (Japan)
  3. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Univ. of California, Berkeley, CA (United States); Univ. of California, Berkeley, CA (United States). Radio Astronomy Lab.
  4. Univ. of California, Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC); USDOE Laboratory Directed Research and Development (LDRD) Program
OSTI Identifier:
1656479
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Journal Article: Accepted Manuscript
Journal Name:
Journal of Low Temperature Physics
Additional Journal Information:
Journal Volume: 193; Journal Issue: 5-6; Journal ID: ISSN 0022-2291
Publisher:
Springer
Country of Publication:
United States
Language:
English
Subject:
79 ASTRONOMY AND ASTROPHYSICS; Cosmic microwave background; TES bolometer; micro-fabrication; inflation; polarization; B-mode

Citation Formats

Suzuki, Aritoki, Bebek, Chris, Garcia-Sciveres, Maurice, Holland, Stephen, Kusaka, Akito, Lee, Adrian T., Palaio, Nicholas, Roe, Natalie, and Steinmetz, Leo. Commercialization of Micro-fabrication of Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Studies of the Cosmic Microwave Background. United States: N. p., 2018. Web. doi:10.1007/s10909-018-1903-6.
Suzuki, Aritoki, Bebek, Chris, Garcia-Sciveres, Maurice, Holland, Stephen, Kusaka, Akito, Lee, Adrian T., Palaio, Nicholas, Roe, Natalie, & Steinmetz, Leo. Commercialization of Micro-fabrication of Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Studies of the Cosmic Microwave Background. United States. https://doi.org/10.1007/s10909-018-1903-6
Suzuki, Aritoki, Bebek, Chris, Garcia-Sciveres, Maurice, Holland, Stephen, Kusaka, Akito, Lee, Adrian T., Palaio, Nicholas, Roe, Natalie, and Steinmetz, Leo. 2018. "Commercialization of Micro-fabrication of Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Studies of the Cosmic Microwave Background". United States. https://doi.org/10.1007/s10909-018-1903-6. https://www.osti.gov/servlets/purl/1656479.
@article{osti_1656479,
title = {Commercialization of Micro-fabrication of Antenna-Coupled Transition Edge Sensor Bolometer Detectors for Studies of the Cosmic Microwave Background},
author = {Suzuki, Aritoki and Bebek, Chris and Garcia-Sciveres, Maurice and Holland, Stephen and Kusaka, Akito and Lee, Adrian T. and Palaio, Nicholas and Roe, Natalie and Steinmetz, Leo},
abstractNote = {In this work, we report on the development of commercially fabricated multichroic antenna-coupled transition edge sensor (TES) bolometer arrays for cosmic microwave background (CMB) polarimetry experiments. CMB polarimetry experiments have deployed instruments in stages. Additionally, stage II experiments deployed with O(1000) detectors and reported successful detection of B-mode (divergence-free) polarization pattern in the CMB. Stage III experiments have recently started observing with O(10,000) detectors with wider frequency coverage. A concept for a stage IV experiment, CMB-S4, is emerging to make a definitive measurement of CMB polarization from the ground with O(400,000) detectors. The orders of magnitude increase in detector count for CMB-S4 require a new approach in detector fabrication to increase fabrication throughput and reduce the cost. We report on collaborative efforts with two commercial micro-fabrication foundries to fabricate antenna-coupled TES bolometer detectors. The detector design is based on the sinuous antenna-coupled dichroic detector from the POLARBEAR-2 experiment. The TES bolometers showed the expected I–V response, and the RF performance agrees with the simulation. We will discuss the motivation, design consideration, fabrication processes, test results, and how industrial detector fabrication could be a path to fabricate hundreds of detector wafers for future CMB polarimetry experiments.},
doi = {10.1007/s10909-018-1903-6},
url = {https://www.osti.gov/biblio/1656479}, journal = {Journal of Low Temperature Physics},
issn = {0022-2291},
number = 5-6,
volume = 193,
place = {United States},
year = {2018},
month = {4}
}

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Works referenced in this record:

Status of the CCD development for the Dark Energy Spectroscopic Instrument
journal, April 2017


AlMn Transition Edge Sensors for Advanced ACTPol
journal, February 2016


Multi-Chroic Dual-Polarization Bolometric Detectors for Studies of the Cosmic Microwave Background
journal, January 2014


The POLARBEAR-2 and Simons Array Focal Plane Fabrication Status
journal, September 2018


Works referencing / citing this record: