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Thermal and radiation response of 4H–SiC Schottky diodes with direct-write electrical contacts

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/5.0007496· OSTI ID:1651350
 [1];  [2];  [2];  [2];  [2];  [2];  [2];  [2];  [2];  [3];  [2]
  1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); The Ohio State Univ., Columbus, OH (United States)
  2. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
  3. The Ohio State Univ., Columbus, OH (United States)
In this work, a high-sensitivity 4H–SiC temperature sensor and an alpha detector have been fabricated using additively printed metal contacts. The surface morphology and electrical conductivity of the printed electrodes were established prior to Schottky diode development. 4H–SiC Schottky diodes with direct-write printed silver contacts on the 5 μm-thick epilayer on 4H–SiC were characterized electrically in terms of the forward and reverse current–voltage and high-frequency capacitance–voltage characteristics. Furthermore, the turn-on voltage of the Schottky diodes, as established from the forward current–voltage characteristics measured up to a temperature of 400 °C, showed a linear temperature dependence. Schottky diodes with direct-write printed Ag electrodes were able to measure alpha particles emitted from Americium-241. The high temperature and radiation response of the Schottky diodes show their suitability for multi-modal sensor fusion on the 4H–SiC platform for harsh environment applications.
Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
Grant/Contract Number:
AC05-00OR22725
OSTI ID:
1651350
Alternate ID(s):
OSTI ID: 1635070
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 25 Vol. 116; ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English

References (12)

Progress in silicon carbide semiconductor electronics technology journal April 1995
Direct writing technology—Advances and developments journal January 2008
Divanadium Pentoxide/4H-silicon Carbide: A Schottky Contact for Highly Linear Temperature Sensors journal January 2016
Schottky barrier formation and band bending revealed by first- principles calculations journal June 2015
Temperature sensor based on 4H-silicon carbide pn diode operational from 20 °C to 600 °C journal February 2014
Direct printing of metal contacts on 4H-SiC for radiation detection journal September 2019
SiC sensors: a review journal October 2007
Electron transport at metal-semiconductor interfaces: General theory journal June 1992
High-Performance Temperature Sensor Based on 4H-SiC Schottky Diodes journal July 2015
Highly Linear Temperature Sensor Based on 4H-Silicon Carbide p-i-n Diodes journal November 2015
Proximity Charge Sensing With Semiconductor Detectors journal June 2009
High temperature, harsh environment sensors for advanced power generation systems conference May 2015

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