Sputter roughening instability on the Ge(001) surface: Energy and flux dependence
Conference
·
OSTI ID:164444
We have measured surface roughening kinetics during low energy Xe ion sputtering of Ge (001) surfaces. Results are interpreted in terms of an instability theory developed by Bradley and Harper. Although the calculated magnitude of the roughening rate does not agree with the measured value, the variation of the rate with ion flux and energy is on agreement with the theory.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 164444
- Report Number(s):
- SAND--95-1454C; CONF-951155--16; ON: DE96003650
- Country of Publication:
- United States
- Language:
- English
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