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U.S. Department of Energy
Office of Scientific and Technical Information

Top-Down Etch Processes for III-Nitride Nanophotonics.

Conference ·
Abstract not provided.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1642613
Report Number(s):
SAND2019-11755C; 679844
Country of Publication:
United States
Language:
English

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