Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Plank, Harald; Winkler, Robert; Schwalb, Christian H.; Hütner, Johanna; Fowlkes, Jason D.; Rack, Philip D.; Utke, Ivo; Huth, Michael

doi:10.3390/mi11010048

Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Journal Article · Sun Dec 29 23:00:00 EST 2019 · Micromachines

DOI:https://doi.org/10.3390/mi11010048· OSTI ID:1628463

^[1]; ^[2]; Schwalb, Christian H. ^[3]; Hütner, Johanna ^[3]; ^[4]; ^[4]; Utke, Ivo ^[5]; ^[6]

Graz Univ. of Technology (Austria). Inst. of Electron Microscopy and Nanoalnalysis. Christian Doppler Lab. for Direct-Write Fabrication of 3D Nano-Probes (DEFINE); Graz Univ. of Technology (Austria). Inst. of Electron Microscopy and Nanoanalysis; Graz Centre for Electron Microscopy, Graz (Austria); DOE/OSTI
Graz Univ. of Technology (Austria). Inst. of Electron Microscopy and Nanoalnalysis. Christian Doppler Lab. for Direct-Write Fabrication of 3D Nano-Probes (DEFINE)
GETec Microscopy GmbH, Vienna (Austria)
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS); Univ. of Tennessee, Knoxville, TN (United States). Materials Science and Engineering
Empa-Swiss Federal Labs for Materials Science and Technology, Thun (Switzerland). Mechanics of Materials and Nanostructures Lab.
Goethe Univ., Frankfurt (Germany). Physics Inst.

Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication/modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.

View Accepted Manuscript (DOE)

Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1628463

Alternate ID(s):: OSTI ID: 1761729

Journal Information:: Micromachines, Journal Name: Micromachines Journal Issue: 1 Vol. 11; ISSN 2072-666X

Publisher:: MDPICopyright Statement

Country of Publication:: United States

Language:: English

References (164)

Generation Mechanism andin situ Growth Behavior of α-Iron Nanocrystals by Electron Beam Induced Deposition Zhang, W.; Shimojo, M.; Takeguchi, M. Advanced Engineering Materials, Vol. 8, Issue 8 https://doi.org/10.1002/adem.200600026	journal	August 2006
Tunable 3D Nanoresonators for Gas‐Sensing Applications Arnold, Georg; Winkler, Robert; Stermitz, Martin Advanced Functional Materials, Vol. 28, Issue 19 https://doi.org/10.1002/adfm.201707387	journal	March 2018
Additive Manufacturing of Metal Structures at the Micrometer Scale Hirt, Luca; Reiser, Alain; Spolenak, Ralph Advanced Materials, Vol. 29, Issue 17 https://doi.org/10.1002/adma.201604211	journal	January 2017
Tunable Nanosynthesis of Composite Materials by Electron-Impact Reaction Bernau, Laurent; Gabureac, Mihai; Erni, Rolf Angewandte Chemie, Vol. 122, Issue 47 https://doi.org/10.1002/ange.201004220	journal	October 2010
Focused Electron Beam Induced Deposition of Si-Based Materials From SiOxCy to Stoichiometric SiO2: Chemical Compositions, Chemical-Etch Rates, and Deep Ultraviolet Optical Transmissions Perentes, A.; Hoffmann, P. Chemical Vapor Deposition, Vol. 13, Issue 4 https://doi.org/10.1002/cvde.200606583	journal	April 2007
Pressure effect of growing with electron beam-induced deposition with tungsten hexafluoride and tetraethylorthosilicate precursor Choi, Young R.; Rack, Philip D.; Randolph, Steven J. Scanning, Vol. 28, Issue 6 https://doi.org/10.1002/sca.4950280603	journal	November 2006
Understanding the Kinetics and Nanoscale Morphology of Electron-Beam-Induced Deposition via a Three-Dimensional Monte Carlo Simulation: The Effects of the Precursor Molecule and the Deposited Material Smith, Daryl A.; Fowlkes, Jason D.; Rack, Philip D. Small, Vol. 4, Issue 9 https://doi.org/10.1002/smll.200701133	journal	September 2008
Remote Magnetomechanical Nanoactuation Vavassori, Paolo; Pancaldi, Matteo; Perez-Roldan, Maria J. Small, Vol. 12, Issue 8 https://doi.org/10.1002/smll.201503351	journal	January 2016
Nanolithography with an atomic force microscope Wendel, M.; Irmer, B.; Cortes, J. Superlattices and Microstructures, Vol. 20, Issue 3 https://doi.org/10.1006/spmi.1996.0088	journal	October 1996
Spatial chemistry evolution during focused electron beam-induced deposition: origins and workarounds Winkler, Robert; Geier, Barbara; Plank, Harald Applied Physics A, Vol. 117, Issue 4 https://doi.org/10.1007/s00339-014-8496-y	journal	May 2014
The future of focused electron beam-induced processing Hagen, C. W. Applied Physics A, Vol. 117, Issue 4 https://doi.org/10.1007/s00339-014-8847-8	journal	November 2014
Use of AFM in bio-related systems Cohen, Sidney R.; Bitler, Arkady Current Opinion in Colloid & Interface Science, Vol. 13, Issue 5 https://doi.org/10.1016/j.cocis.2008.02.002	journal	October 2008
Focused electron beam induced deposition as a tool to create electron vortices Béché, A.; Winkler, R.; Plank, H. Micron, Vol. 80 https://doi.org/10.1016/j.micron.2015.07.011	journal	January 2016
Atomic force microscopy for two-dimensional materials: A tutorial review Zhang, Hang; Huang, Junxiang; Wang, Yongwei Optics Communications, Vol. 406 https://doi.org/10.1016/j.optcom.2017.05.015	journal	January 2018
Focused Electron and Ion Beam Induced Deposition on Flexible and Transparent Polycarbonate Substrates Peinado, Patricia; Sangiao, Soraya; De Teresa, José M. ACS Nano, Vol. 9, Issue 6 https://doi.org/10.1021/acsnano.5b01383	journal	May 2015
Impact of Electron-Beam Heating during 3D Nanoprinting Mutunga, Eva; Winkler, Robert; Sattelkow, Jürgen ACS Nano, Vol. 13, Issue 5 https://doi.org/10.1021/acsnano.8b09341	journal	April 2019
Core–Shell Plasmonic Nanohelices Kosters, Dolfine; de Hoogh, Anouk; Zeijlemaker, Hans ACS Photonics, Vol. 4, Issue 7 https://doi.org/10.1021/acsphotonics.7b00496	journal	June 2017
The Nanoscale Implications of a Molecular Gas Beam during Electron Beam Induced Deposition Winkler, Robert; Fowlkes, Jason; Szkudlarek, Aleksandra ACS Applied Materials & Interfaces, Vol. 6, Issue 4 https://doi.org/10.1021/am405591d	journal	February 2014
Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis Arnold, Georg; Timilsina, Rajendra; Fowlkes, Jason ACS Applied Materials & Interfaces, Vol. 6, Issue 10 https://doi.org/10.1021/am5008003	journal	May 2014
Toward Ultraflat Surface Morphologies During Focused Electron Beam Induced Nanosynthesis: Disruption Origins and Compensation Winkler, Robert; Szkudlarek, Aleksandra; Fowlkes, Jason D. ACS Applied Materials & Interfaces, Vol. 7, Issue 5 https://doi.org/10.1021/am508052k	journal	January 2015
Rapid and Highly Compact Purification for Focused Electron Beam Induced Deposits: A Low Temperature Approach Using Electron Stimulated H ₂ O Reactions Geier, Barbara; Gspan, Christian; Winkler, Robert The Journal of Physical Chemistry C, Vol. 118, Issue 25 https://doi.org/10.1021/jp503442b	journal	June 2014
Solid Gold Nanostructures Fabricated by Electron Beam Deposition Mølhave, Kristian; Madsen, Dorte Nørgaard; Rasmussen, Anne Marie Nano Letters, Vol. 3, Issue 11 https://doi.org/10.1021/nl034528o	journal	November 2003
Toward Local Growth of Individual Nanowires on Three-Dimensional Microstructures by Using a Minimally Invasive Catalyst Templating Method Jenke, Martin Günter; Lerose, Damiana; Niederberger, Christoph Nano Letters, Vol. 11, Issue 10 https://doi.org/10.1021/nl2021448	journal	October 2011
Ultrasmall Functional Ferromagnetic Nanostructures Grown by Focused Electron-Beam-Induced Deposition Serrano-Ramón, Luis; Córdoba, Rosa; Rodríguez, Luis Alfredo ACS Nano, Vol. 5, Issue 10 https://doi.org/10.1021/nn201517r	journal	September 2011
Binary Pt–Si Nanostructures Prepared by Focused Electron-Beam-Induced Deposition Winhold, Marcel; Schwalb, Christian H.; Porrati, Fabrizio ACS Nano, Vol. 5, Issue 12 https://doi.org/10.1021/nn203134a	journal	November 2011
Nanoscale chemical mapping using three-dimensional adiabatic compression of surface plasmon polaritons De Angelis, Francesco; Das, Gobind; Candeloro, Patrizio Nature Nanotechnology, Vol. 5, Issue 1 https://doi.org/10.1038/nnano.2009.348	journal	November 2009
High-speed photothermal off-resonance atomic force microscopy reveals assembly routes of centriolar scaffold protein SAS-6 Nievergelt, Adrian P.; Banterle, Niccolò; Andany, Santiago H. Nature Nanotechnology, Vol. 13, Issue 8 https://doi.org/10.1038/s41565-018-0149-4	journal	May 2018
Highly conductive and pure gold nanostructures grown by electron beam induced deposition Shawrav, Mostafa M.; Taus, Philipp; Wanzenboeck, Heinz D. Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep34003	journal	September 2016
Mechanical meta-materials Zadpoor, Amir A. Materials Horizons, Vol. 3, Issue 5 https://doi.org/10.1039/c6mh00065g	journal	January 2016
Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition Lewis, Brett B.; Mound, Brittnee A.; Srijanto, Bernadeta Nanoscale, Vol. 9, Issue 42 https://doi.org/10.1039/c7nr05274j	journal	January 2017
Electron beam deposition of gold nanostructures in a reactive environment Folch, Albert; Tejada, Javier; Peters, Christopher H. Applied Physics Letters, Vol. 66, Issue 16 https://doi.org/10.1063/1.113909	journal	April 1995
Josephson junctions defined by a nanoplough Irmer, B.; Blick, R. H.; Simmel, F. Applied Physics Letters, Vol. 73, Issue 14 https://doi.org/10.1063/1.122364	journal	October 1998
Gold elliptical nanoantennas as probes for near field optical microscopy Sqalli, O.; Utke, I.; Hoffmann, P. Journal of Applied Physics, Vol. 92, Issue 2 https://doi.org/10.1063/1.1487918	journal	July 2002
Ion and electron beam assisted growth of nanometric SimOn structures for near-field microscopy Sánchez, E. J.; Krug, J. T.; Xie, X. S. Review of Scientific Instruments, Vol. 73, Issue 11 https://doi.org/10.1063/1.1511801	journal	November 2002
Specimen Contamination in Electron Microscopes Watson, John H. L. Journal of Applied Physics, Vol. 19, Issue 1 https://doi.org/10.1063/1.1697863	journal	January 1948
Fabrication by electron beam induced deposition and transmission electron microscopic characterization of sub-10-nm freestanding Pt nanowires Frabboni, S.; Gazzadi, G. C.; Felisari, L. Applied Physics Letters, Vol. 88, Issue 21 https://doi.org/10.1063/1.2206996	journal	May 2006
Granular metals: From electronic correlations to strain-sensing applications Huth, Michael Journal of Applied Physics, Vol. 107, Issue 11 https://doi.org/10.1063/1.3443437	journal	June 2010
Enhanced imaging of biomolecules with electron beam deposited tips for scanning force microscopy Zenhausern, F.; Adrian, M.; ten Heggeler‐Bordier, B. Journal of Applied Physics, Vol. 73, Issue 11 https://doi.org/10.1063/1.354010	journal	June 1993
Spectroscopic defect imaging in magnetic nanostructure arrays Chia, Han-Jong; Guo, Feng; Belova, L. M. Applied Physics Letters, Vol. 101, Issue 4 https://doi.org/10.1063/1.4738789	journal	July 2012
Rapid preparation of electron beam induced deposition Co magnetic force microscopy tips with 10 nm spatial resolution Belova, L. M.; Hellwig, Olav; Dobisz, Elizabeth Review of Scientific Instruments, Vol. 83, Issue 9 https://doi.org/10.1063/1.4752225	journal	September 2012
3D nanoprinting via focused electron beams Winkler, R.; Fowlkes, J. D.; Rack, P. D. Journal of Applied Physics, Vol. 125, Issue 21 https://doi.org/10.1063/1.5092372	journal	June 2019
Optimized molecule supply from nozzle-based gas injection systems for focused electron- and ion-beam induced deposition and etching: simulation and experiment Friedli, V.; Utke, I. Journal of Physics D: Applied Physics, Vol. 42, Issue 12 https://doi.org/10.1088/0022-3727/42/12/125305	journal	June 2009
Magnetotransport properties of high-quality cobalt nanowires grown by focused-electron-beam-induced deposition Fernández-Pacheco, A.; De Teresa, J. M.; Córdoba, R. Journal of Physics D: Applied Physics, Vol. 42, Issue 5 https://doi.org/10.1088/0022-3727/42/5/055005	journal	February 2009
Fabrication and actuation of customized nanotweezers with a 25 nm gap Bøggild, P.; Hansen, T. M.; Tanasa, C. Nanotechnology, Vol. 12, Issue 3 https://doi.org/10.1088/0957-4484/12/3/322	journal	August 2001
Constructing, connecting and soldering nanostructures by environmental electron beam deposition Mølhave, Kristian; Madsen, Dorte Nørgaard; Dohn, Søren Nanotechnology, Vol. 15, Issue 8 https://doi.org/10.1088/0957-4484/15/8/033	journal	June 2004
Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition Takeguchi, Masaki; Shimojo, Masayuki; Furuya, Kazuo Nanotechnology, Vol. 16, Issue 8 https://doi.org/10.1088/0957-4484/16/8/057	journal	June 2005
Fabrication of high-aspect-ratio carbon nanocone probes by electron beam induced deposition patterning Chen, I-Chen; Chen, Li-Han; Orme, Christine Nanotechnology, Vol. 17, Issue 17 https://doi.org/10.1088/0957-4484/17/17/007	journal	August 2006
A nanoscale three-dimensional Monte Carlo simulation of electron-beam-induced deposition with gas dynamics Smith, D. A.; Fowlkes, J. D.; Rack, P. D. Nanotechnology, Vol. 18, Issue 26 https://doi.org/10.1088/0957-4484/18/26/265308	journal	June 2007
Growth behavior near the ultimate resolution of nanometer-scale focused electron beam-induced deposition van Dorp, W. F.; Hagen, C. W.; Crozier, P. A. Nanotechnology, Vol. 19, Issue 22 https://doi.org/10.1088/0957-4484/19/22/225305	journal	April 2008
Single-crystal nanowires grown via electron-beam-induced deposition Klein, K. L.; Randolph, S. J.; Fowlkes, J. D. Nanotechnology, Vol. 19, Issue 34 https://doi.org/10.1088/0957-4484/19/34/345705	journal	July 2008
Simulating the effects of surface diffusion on electron beam induced deposition via a three-dimensional Monte Carlo simulation Smith, Daryl A.; Fowlkes, Jason D.; Rack, Philip D. Nanotechnology, Vol. 19, Issue 41 https://doi.org/10.1088/0957-4484/19/41/415704	journal	September 2008
Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective Botman, A.; Mulders, J. J. L.; Hagen, C. W. Nanotechnology, Vol. 20, Issue 37 https://doi.org/10.1088/0957-4484/20/37/372001	journal	August 2009
Granular Co–C nano-Hall sensors by focused-beam-induced deposition Gabureac, Mihai; Bernau, Laurent; Utke, Ivo Nanotechnology, Vol. 21, Issue 11 https://doi.org/10.1088/0957-4484/21/11/115503	journal	February 2010
Fabrication and buckling dynamics of nanoneedle AFM probes Beard, J. D.; Gordeev, S. N. Nanotechnology, Vol. 22, Issue 17 https://doi.org/10.1088/0957-4484/22/17/175303	journal	March 2011
Synthesis and electroplating of high resolution insulated carbon nanotube scanning probes for imaging in liquid solutions Roberts, N. A.; Noh, J. H.; Lassiter, M. G. Nanotechnology, Vol. 23, Issue 14 https://doi.org/10.1088/0957-4484/23/14/145301	journal	March 2012
Variable tunneling barriers in FEBID based PtC metal-matrix nanocomposites as a transducing element for humidity sensing Kolb, Florian; Schmoltner, Kerstin; Huth, Michael Nanotechnology, Vol. 24, Issue 30 https://doi.org/10.1088/0957-4484/24/30/305501	journal	July 2013
Three-dimensional core–shell ferromagnetic nanowires grown by focused electron beam induced deposition Pablo-Navarro, Javier; Magén, César; de Teresa, José María Nanotechnology, Vol. 27, Issue 28 https://doi.org/10.1088/0957-4484/27/28/285302	journal	June 2016
Investigation of fabrication parameters for the electron-beam-induced deposition of contamination tips used in atomic force microscopy Schiffmann, K. I. Nanotechnology, Vol. 4, Issue 3 https://doi.org/10.1088/0957-4484/4/3/006	journal	July 1993
Functionalized Akiyama tips for magnetic force microscopy measurements Stiller, Markus; Barzola-Quiquia, José; Esquinazi, Pablo D. Measurement Science and Technology, Vol. 28, Issue 12 https://doi.org/10.1088/1361-6501/aa925e	journal	November 2017
Focused electron-beam-induced deposition for fabrication of highly durable and sensitive metallic AFM-IR probes Qian, Wen; Sun, Shuo; Song, Jingfeng Nanotechnology, Vol. 29, Issue 33 https://doi.org/10.1088/1361-6528/aac73c	journal	June 2018
Nanoscale Spin Wave Localization Using Ferromagnetic Resonance Force Microscopy Chia, Han-Jong; Guo, Feng; Belova, L. M. Physical Review Letters, Vol. 108, Issue 8 https://doi.org/10.1103/physrevlett.108.087206	journal	February 2012
Spectroscopy and Imaging of Edge Modes in Permalloy Nanodisks Guo, Feng; Belova, L. M.; McMichael, R. D. Physical Review Letters, Vol. 110, Issue 1 https://doi.org/10.1103/physrevlett.110.017601	journal	January 2013
Novel high resolution scanning thermal probe Edinger, K.; Gotszalk, T.; Rangelow, I. W. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 6 https://doi.org/10.1116/1.1420580	journal	January 2001
Properties and applications of cobalt-based material produced by electron-beam-induced deposition Lau, Y. M.; Chee, P. C.; Thong, J. T. L. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 20, Issue 4 https://doi.org/10.1116/1.1481040	journal	July 2002
Electron beam induced deposition of low resistivity platinum from Pt(PF[sub 3])[sub 4] Barry, John D.; Ervin, Matthew; Molstad, Jay Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 6 https://doi.org/10.1116/1.2395962	journal	January 2006
Oxygen assisted focused electron beam induced deposition of Si-containing materials: Growth dynamics Perentes, A.; Hoffmann, P. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6 https://doi.org/10.1116/1.2798746	journal	January 2007
Gas-assisted focused electron beam and ion beam processing and fabrication Utke, Ivo; Hoffmann, Patrik; Melngailis, John Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 4 https://doi.org/10.1116/1.2955728	journal	January 2008
Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits Plank, Harald; Kothleitner, Gerald; Hofer, Ferdinand Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 5 https://doi.org/10.1116/1.3622314	journal	September 2011
Parallel electron-beam-induced deposition using a multi-beam scanning electron microscope Post, P. C.; Mohammadi-Gheidari, A.; Hagen, C. W. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 6 https://doi.org/10.1116/1.3656027	journal	November 2011
Helium ion beam induced growth of hammerhead AFM probes Nanda, Gaurav; van Veldhoven, Emile; Maas, Diederik Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 33, Issue 6 https://doi.org/10.1116/1.4936068	journal	November 2015
Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams Stanford, Michael G.; Lewis, Brett B.; Mahady, Kyle Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 35, Issue 3 https://doi.org/10.1116/1.4981016	journal	May 2017
True Atomic Resolution by Atomic Force Microscopy Through Repulsive and Attractive Forces Ohnesorge, F.; Binnig, G. Science, Vol. 260, Issue 5113 https://doi.org/10.1126/science.260.5113.1451	journal	June 1993
In Situ Real-Time Annealing of Ultrathin Vertical Fe Nanowires Grown by Focused Electron Beam Induced Deposition Pablo-Navarro, Javier; Winkler, Robert; Haberfehlner, Georg SSRN Electronic Journal https://doi.org/10.2139/ssrn.3384286	journal	January 2019
Magnetic Characterization of Direct-Write Free-Form Building Blocks for Artificial Magnetic 3D Lattices Al Mamoori, Mohanad; Keller, Lukas; Pieper, Jonathan Materials, Vol. 11, Issue 2 https://doi.org/10.3390/ma11020289	journal	February 2018
Simulation Informed CAD for 3D Nanoprinting Fowlkes, Jason D.; Winkler, Robert; Mutunga, Eva Micromachines, Vol. 11, Issue 1 https://doi.org/10.3390/mi11010008	journal	December 2019
Focused electron beam induced deposition: A perspective Huth, Michael; Porrati, Fabrizio; Schwalb, Christian Beilstein Journal of Nanotechnology, Vol. 3 https://doi.org/10.3762/bjnano.3.70	journal	January 2012
Influence of the shape and surface oxidation in the magnetization reversal of thin iron nanowires grown by focused electron beam induced deposition Rodríguez, Luis A.; Deen, Lorenz; Córdoba, Rosa Beilstein Journal of Nanotechnology, Vol. 6 https://doi.org/10.3762/bjnano.6.136	journal	January 2015
Continuum models of focused electron beam induced processing Toth, Milos; Lobo, Charlene; Friedli, Vinzenz Beilstein Journal of Nanotechnology, Vol. 6 https://doi.org/10.3762/bjnano.6.157	journal	January 2015
The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors Thorman, Rachel M.; Kumar T. P., Ragesh; Fairbrother, D. Howard Beilstein Journal of Nanotechnology, Vol. 6 https://doi.org/10.3762/bjnano.6.194	journal	January 2015
Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition Spencer, Julie A.; Barclay, Michael; Gallagher, Miranda J. Beilstein Journal of Nanotechnology, Vol. 8 https://doi.org/10.3762/bjnano.8.240	journal	January 2017
3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity Lewis, Brett B.; Winkler, Robert; Sang, Xiahan Beilstein Journal of Nanotechnology, Vol. 8 https://doi.org/10.3762/bjnano.8.83	journal	January 2017
Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition Keller, Lukas; Huth, Michael Beilstein Journal of Nanotechnology, Vol. 9 https://doi.org/10.3762/bjnano.9.240	journal	January 2018
Towards the third dimension in direct electron beam writing of silver Höflich, Katja; Jurczyk, Jakub Mateusz; Madajska, Katarzyna Beilstein Journal of Nanotechnology, Vol. 9 https://doi.org/10.3762/bjnano.9.78	journal	January 2018
Variation of the metallic content of Focused Electron Beam Induced Deposition of Cobalt Bernau, Laurent; Gabureac, Mihai; Utke, Ivo arXiv https://doi.org/10.48550/arxiv.1002.2156	text	January 2010
Dielectric sensing by charging energy modulation in a nano-granular metal Huth, Michael; Kolb, Florian; Plank, Harald arXiv https://doi.org/10.48550/arxiv.1404.3541	text	January 2014
Direct writing of CoFe alloy nanostructures by focused electron beam induced deposition from a heteronuclear precursor Porrati, F.; Pohlit, M.; Muller, J. arXiv https://doi.org/10.48550/arxiv.1506.07311	preprint	January 2015
Functionalization of atomic force microscopy Akiyama tips for magnetic force microscopy measurements Stiller, Markus; Barzola-Quiquia, Jose; Esquinazi, Pablo D. arXiv https://doi.org/10.48550/arxiv.1709.05621	preprint	January 2017
Focused electron beam induced deposition meets materials science Huth, Michael; Porrati, Fabrizio; Dobrovolskiy, Oleksandr V. arXiv https://doi.org/10.48550/arxiv.1709.05835	text	January 2017
Magnetic properties of optimized cobalt nanospheres grown by Focused Electron Beam Induced Deposition (FEBID) on cantilever tips Sangiao, Soraya; Magen, Cesar; Mofakhami, Darius arXiv https://doi.org/10.48550/arxiv.1709.09374	preprint	January 2017
Oxygen assisted focused electron beam induced deposition of silicon dioxide Alexandre, Perentes, Lausanne, EPFL https://doi.org/10.5075/epfl-thesis-3930	text	January 2007
Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition Guo, Dengji; Kometani, Reo; Warisawa, Shin'ichi Japanese Journal of Applied Physics, Vol. 51, Issue 6R https://doi.org/10.7567/jjap.51.065001	journal	June 2012
Tunable Nanosynthesis of Composite Materials by Electron-Impact Reaction Bernau, Laurent; Gabureac, Mihai; Erni, Rolf Angewandte Chemie International Edition, Vol. 49, Issue 47 https://doi.org/10.1002/anie.201004220	journal	October 2010
Focused Electron Beam Induced Deposition of Si-Based Materials From SiOxCy to Stoichiometric SiO2: Chemical Compositions, Chemical-Etch Rates, and Deep Ultraviolet Optical Transmissions Perentes, A.; Hoffmann, P. Chemical Vapor Deposition, Vol. 13, Issue 10 https://doi.org/10.1002/cvde.200790029	journal	October 2007
Scanning thermal microscopy: A review: Scanning thermal microscopy Gomès, Séverine; Assy, Ali; Chapuis, Pierre-Olivier physica status solidi (a), Vol. 212, Issue 3 https://doi.org/10.1002/pssa.201400360	journal	March 2015
Industrial perspective on focused electron beam-induced processes Bret, Tristan; Hofmann, Thorsten; Edinger, Klaus Applied Physics A, Vol. 117, Issue 4 https://doi.org/10.1007/s00339-014-8601-2	journal	July 2014
Dielectric sensing by charging energy modulation in a nano-granular metal Huth, Michael; Kolb, Florian; Plank, Harald Applied Physics A, Vol. 117, Issue 4 https://doi.org/10.1007/s00339-014-8631-9	journal	July 2014
Nanoscale electron beam-induced deposition and purification of ruthenium for extreme ultraviolet lithography mask repair Noh, J. H.; Stanford, M. G.; Lewis, B. B. Applied Physics A, Vol. 117, Issue 4 https://doi.org/10.1007/s00339-014-8745-0	journal	August 2014
Focused helium-ion-beam-induced deposition Alkemade, P. F. A.; Miro, H. Applied Physics A, Vol. 117, Issue 4 https://doi.org/10.1007/s00339-014-8763-y	journal	September 2014
Tips for scanning tunneling microscopy produced by electron-beam-induced deposition Hübner, B.; Koops, H. W. P.; Pagnia, H. Ultramicroscopy, Vol. 42-44 https://doi.org/10.1016/0304-3991(92)90476-Z	journal	July 1992
Thermal nano-probe Rangelow, I. W.; Gotszalk, T.; Grabiec, P. Microelectronic Engineering, Vol. 57-58 https://doi.org/10.1016/S0167-9317(01)00466-X	journal	September 2001
Near field optical behaviour of C supertips Castagné, M.; Benfedda, M.; Lahimer, S. Ultramicroscopy, Vol. 76, Issue 4 https://doi.org/10.1016/S0304-3991(98)00075-8	journal	April 1999
A review of focused ion beam milling techniques for TEM specimen preparation Giannuzzi, L. A.; Stevie, F. A. Micron, Vol. 30, Issue 3 https://doi.org/10.1016/S0968-4328(99)00005-0	journal	June 1999
In situ real-time annealing of ultrathin vertical Fe nanowires grown by focused electron beam induced deposition Pablo-Navarro, Javier; Winkler, Robert; Haberfehlner, Georg Acta Materialia, Vol. 174 https://doi.org/10.1016/j.actamat.2019.05.035	journal	August 2019
High-purity cobalt nanostructures grown by focused-electron-beam-induced deposition at low current Córdoba, R.; Sesé, J.; De Teresa, J. M. Microelectronic Engineering, Vol. 87, Issue 5-8 https://doi.org/10.1016/j.mee.2009.11.027	journal	May 2010
Focused electron beam induced deposition meets materials science Huth, M.; Porrati, F.; Dobrovolskiy, O. V. Microelectronic Engineering, Vol. 185-186 https://doi.org/10.1016/j.mee.2017.10.012	journal	January 2018
Kelvin probe force microscopy and its application Melitz, Wilhelm; Shen, Jian; Kummel, Andrew C. Surface Science Reports, Vol. 66, Issue 1 https://doi.org/10.1016/j.surfrep.2010.10.001	journal	January 2011
Electrically conducting, ultra-sharp, high aspect-ratio probes for AFM fabricated by electron-beam-induced deposition of platinum Brown, Jason; Kocher, Paul; Ramanujan, Chandra S. Ultramicroscopy, Vol. 133 https://doi.org/10.1016/j.ultramic.2013.05.005	journal	October 2013
Effects of Water Vapour on Electron and Ion Beam Deposited Platinum Langford, Richard M.; Ozkaya, Dogan; Sheridan, J. Microscopy and Microanalysis, Vol. 10, Issue S02 https://doi.org/10.1017/S1431927604883417	journal	August 2004
3D Magnetic Induction Maps of Nanoscale Materials Revealed by Electron Holographic Tomography Wolf, Daniel; Rodriguez, Luis A.; Béché, Armand Chemistry of Materials, Vol. 27, Issue 19 https://doi.org/10.1021/acs.chemmater.5b02723	journal	September 2015
Electron Induced Surface Reactions of HFeCo ₃ (CO) ₁₂ , a Bimetallic Precursor for Focused Electron Beam Induced Deposition (FEBID) T. P., Ragesh Kumar; Unlu, Ilyas; Barth, Sven The Journal of Physical Chemistry C, Vol. 122, Issue 5 https://doi.org/10.1021/acs.jpcc.7b08611	journal	January 2018
Direct-Write 3D Nanoprinting of Plasmonic Structures Winkler, Robert; Schmidt, Franz-Philipp; Haselmann, Ulrich ACS Applied Materials & Interfaces, Vol. 9, Issue 9 https://doi.org/10.1021/acsami.6b13062	journal	December 2016
Probing the Morphology and Evolving Dynamics of 3D Printed Nanostructures Using High-Speed Atomic Force Microscopy Yang, Chen; Winkler, Robert; Dukic, Maja ACS Applied Materials & Interfaces, Vol. 9, Issue 29 https://doi.org/10.1021/acsami.7b07762	journal	July 2017
Three-Dimensional Nanothermistors for Thermal Probing Sattelkow, Jürgen; Fröch, Johannes E.; Winkler, Robert ACS Applied Materials & Interfaces, Vol. 11, Issue 25 https://doi.org/10.1021/acsami.9b04497	journal	June 2019
High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID) Fowlkes, Jason D.; Winkler, R.; Lewis, Brett B. ACS Applied Nano Materials, Vol. 1, Issue 3 https://doi.org/10.1021/acsanm.7b00342	journal	February 2018
High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Growth Fundamentals Winkler, R.; Lewis, B. B.; Fowlkes, J. D. ACS Applied Nano Materials, Vol. 1, Issue 3 https://doi.org/10.1021/acsanm.8b00158	journal	February 2018
Analyzing the Nanogranularity of Focused-Electron-Beam-Induced-Deposited Materials by Electron Tomography Trummer, Cornelia; Winkler, Robert; Plank, Harald ACS Applied Nano Materials, Vol. 2, Issue 9 https://doi.org/10.1021/acsanm.9b01390	journal	August 2019
Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonators Pakeltis, Grace; Hu, Zhongwei; Nixon, Austin G. ACS Applied Nano Materials, Vol. 2, Issue 12 https://doi.org/10.1021/acsanm.9b02182	journal	November 2019
Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition Fowlkes, Jason D.; Winkler, Robert; Lewis, Brett B. ACS Nano, Vol. 10, Issue 6 https://doi.org/10.1021/acsnano.6b02108	journal	May 2016
Free-Standing Magnetic Nanopillars for 3D Nanomagnet Logic Gavagnin, Marco; Wanzenboeck, Heinz D.; Wachter, Stefan ACS Applied Materials & Interfaces, Vol. 6, Issue 22 https://doi.org/10.1021/am505785t	journal	October 2014
Fundamental Proximity Effects in Focused Electron Beam Induced Deposition Plank, Harald; Smith, Daryl A.; Haber, Thomas ACS Nano, Vol. 6, Issue 1 https://doi.org/10.1021/nn204237h	journal	December 2011
Nanoscale 3D Chiral Plasmonic Helices with Circular Dichroism at Visible Frequencies Esposito, Marco; Tasco, Vittorianna; Cuscunà, Massimo ACS Photonics, Vol. 2, Issue 1 https://doi.org/10.1021/ph500318p	journal	December 2014
Nanoscale scanning probe ferromagnetic resonance imaging using localized modes Lee, Inhee; Obukhov, Yuri; Xiang, Gang Nature, Vol. 466, Issue 7308 https://doi.org/10.1038/nature09279	journal	August 2010
Three-dimensional nanomagnetism Fernández-Pacheco, Amalio; Streubel, Robert; Fruchart, Olivier Nature Communications, Vol. 8, Issue 1 https://doi.org/10.1038/ncomms15756	journal	June 2017
Direct-write of free-form building blocks for artificial magnetic 3D lattices Keller, Lukas; Al Mamoori, Mohanad K. I.; Pieper, Jonathan Scientific Reports, Vol. 8, Issue 1 https://doi.org/10.1038/s41598-018-24431-x	journal	April 2018
Mechanical meta-materials Zadpoor, Amir A. Materials Horizons, Vol. 3, Issue 5 https://doi.org/10.1039/C6MH00065G	journal	January 2016
Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition Lewis, Brett B.; Mound, Brittnee A.; Srijanto, Bernadeta Nanoscale, Vol. 9, Issue 42 https://doi.org/10.1039/C7NR05274J	journal	January 2017
Sharpened electron beam deposited tips for high resolution atomic force microscope lithography and imaging Wendel, M.; Lorenz, H.; Kotthaus, J. P. Applied Physics Letters, Vol. 67, Issue 25 https://doi.org/10.1063/1.115365	journal	December 1995
High-resolution magnetic Co supertips grown by a focused electron beam Utke, I.; Hoffmann, P.; Berger, R. Applied Physics Letters, Vol. 80, Issue 25 https://doi.org/10.1063/1.1489097	journal	June 2002
Atomic force probe for sidewall scanning of nano- and microstructures Dai, Gaoliang; Wolff, Helmut; Pohlenz, Frank Applied Physics Letters, Vol. 88, Issue 17 https://doi.org/10.1063/1.2198516	journal	April 2006
Tuning the electrical conductivity of Pt-containing granular metals by postgrowth electron irradiation Porrati, F.; Sachser, R.; Schwalb, C. H. Journal of Applied Physics, Vol. 109, Issue 6 https://doi.org/10.1063/1.3559773	journal	March 2011
Review of magnetic nanostructures grown by focused electron beam induced deposition (FEBID) De Teresa, J. M.; Fernández-Pacheco, A.; Córdoba, R. Journal of Physics D: Applied Physics, Vol. 49, Issue 24 https://doi.org/10.1088/0022-3727/49/24/243003	journal	May 2016
In situ probing of the growth and morphology in electron-beam-induced deposited nanostructures Rack, Philip D.; Fowlkes, Jason D.; Randolph, Steven J. Nanotechnology, Vol. 18, Issue 46 https://doi.org/10.1088/0957-4484/18/46/465602	journal	October 2007
An atomic force microscope nanoscalpel for nanolithography and biological applications Beard, J. D.; Burbridge, D. J.; Moskalenko, A. V. Nanotechnology, Vol. 20, Issue 44 https://doi.org/10.1088/0957-4484/20/44/445302	journal	October 2009
Nanofabrication of insulated scanning probes for electromechanical imaging in liquid solutions Noh, Joo Hyon; Nikiforov, Maxim; Kalinin, Sergei V. Nanotechnology, Vol. 21, Issue 36 https://doi.org/10.1088/0957-4484/21/36/365302	journal	August 2010
Large flexibility of high aspect ratio carbon nanostructures fabricated by electron-beam-induced deposition Beard, J. D.; Gordeev, S. N. Nanotechnology, Vol. 21, Issue 47 https://doi.org/10.1088/0957-4484/21/47/475702	journal	October 2010
A new sequential EBID process for the creation of pure Pt structures from MeCpPtMe ₃ Mehendale, S.; Mulders, J. J. L.; Trompenaars, P. H. F. Nanotechnology, Vol. 24, Issue 14 https://doi.org/10.1088/0957-4484/24/14/145303	journal	March 2013
Chemical tuning of PtC nanostructures fabricated via focused electron beam induced deposition Plank, Harald; Haber, Thomas; Gspan, Christian Nanotechnology, Vol. 24, Issue 17 https://doi.org/10.1088/0957-4484/24/17/175305	journal	April 2013
Direct writing of CoFe alloy nanostructures by focused electron beam induced deposition from a heteronuclear precursor Porrati, F.; Pohlit, M.; Müller, J. Nanotechnology, Vol. 26, Issue 47 https://doi.org/10.1088/0957-4484/26/47/475701	journal	November 2015
Atomic layer etching and sidewall roughness measurement using the scanning tunneling microscope Matsui, S.; Baba, M.; Satoh, A. Nanotechnology, Vol. 3, Issue 3 https://doi.org/10.1088/0957-4484/3/3/011	journal	July 1992
Two-dimensional spectroscopic imaging of individual ferromagnetic nanostripes Chia, Han-Jong; Guo, Feng; Belova, L. M. Physical Review B, Vol. 86, Issue 18 https://doi.org/10.1103/PhysRevB.86.184406	journal	November 2012
Parametric pumping of precession modes in ferromagnetic nanodisks Guo, Feng; Belova, L. M.; McMichael, R. D. Physical Review B, Vol. 89, Issue 10 https://doi.org/10.1103/PhysRevB.89.104422	journal	March 2014
Nonlinear ferromagnetic resonance shift in submicron Permalloy ellipses Guo, Feng; Belova, Lyubov M.; McMichael, Robert D. Physical Review B, Vol. 91, Issue 6 https://doi.org/10.1103/PhysRevB.91.064426	journal	February 2015
Nanoscale Spin Wave Localization Using Ferromagnetic Resonance Force Microscopy Chia, Han-Jong; Guo, Feng; Belova, L. M. Physical Review Letters, Vol. 108, Issue 8 https://doi.org/10.1103/PhysRevLett.108.087206	journal	February 2012
Spectroscopy and Imaging of Edge Modes in Permalloy Nanodisks Guo, Feng; Belova, L. M.; McMichael, R. D. Physical Review Letters, Vol. 110, Issue 1 https://doi.org/10.1103/PhysRevLett.110.017601	journal	January 2013
Focused electron beam induced deposition of gold Utke, I.; Hoffmann, P.; Dwir, B. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 6 https://doi.org/10.1116/1.1319690	journal	January 2000
Carbon nanopillar laterally grown with electron beam-induced chemical vapor deposition Fujita, J.; Ishida, M.; Ichihashi, T. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6 https://doi.org/10.1116/1.1624259	journal	January 2003
Advanced photolithographic mask repair using electron beams Liang, Ted; Frendberg, Eric; Lieberman, Barry Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 6 https://doi.org/10.1116/1.2062428	journal	January 2005
Growth and simulation of high-aspect ratio nanopillars by primary and secondary electron-induced deposition Fowlkes, J. D.; Randolph, S. J.; Rack, P. D. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 6 https://doi.org/10.1116/1.2101732	journal	January 2005
Conductive supertips for scanning probe applications Schössler, C. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 4 https://doi.org/10.1116/1.589394	journal	July 1997
Characterization and Application of Materials Grown by Electron-Beam-Induced Deposition Koops, Hans W. P.; Kretz, Johannes; Rudolph, Michael Japanese Journal of Applied Physics, Vol. 33, Issue Part 1, No. 12B https://doi.org/10.1143/JJAP.33.7099	journal	December 1994
Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition Guo, Dengji; Kometani, Reo; Warisawa, Shin'ichi Japanese Journal of Applied Physics, Vol. 51 https://doi.org/10.1143/jjap.51.065001	journal	May 2012
Focused Electron Beam Induced Deposition of High Resolution Magnetic Scanning Probe Tips Utke, I.; Cicoira, F.; Jaenchen, G. MRS Proceedings, Vol. 706 https://doi.org/10.1557/PROC-706-Z9.24.1	journal	January 2001
Three-dimensional nanomagnetism Fernández-Pacheco, A.; Streubel, R.; Fruchart, O. Apollo - University of Cambridge Repository https://doi.org/10.17863/cam.10808	text	January 2017
High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID) Fowlkes, J.; Winkler, R.; Lewis, B. Apollo - University of Cambridge Repository https://doi.org/10.17863/cam.23278	text	January 2018
Research data supporting "Fabrication of scaffold-based 3D magnetic nanowires for domain wall applications" Sanz-Hernandez, D.; Hamans, Rf; Osterrieth, Johannes Apollo - University of Cambridge Repository https://doi.org/10.17863/cam.24917	dataset	January 2018
Fabrication of Scaffold-Based 3D Magnetic Nanowires for Domain Wall Applications. Sanz-Hernández, Dédalo; Hamans, Ruben F.; Osterrieth, Johannes Apollo - University of Cambridge Repository https://doi.org/10.17863/cam.27891	text	January 2018
Review of magnetic nanostructures grown by focused electron beam induced deposition (FEBID) De Teresa, Jm; Fernández-Pacheco, A.; Córdoba, R. IOP Publishing Group https://doi.org/10.17863/cam.8187	journalarticle	January 2016
Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review Utke, Ivo; Michler, Johann; Winkler, Robert Micromachines, Vol. 11, Issue 4 https://doi.org/10.3390/mi11040397	journal	April 2020
Fabrication of Scaffold-Based 3D Magnetic Nanowires for Domain Wall Applications Sanz-Hernández, Dédalo; Hamans, Ruben; Osterrieth, Johannes Nanomaterials, Vol. 8, Issue 7 https://doi.org/10.3390/nano8070483	journal	June 2018
A Tunable Strain Sensor Using Nanogranular Metals Schwalb, Christian H.; Grimm, Christina; Baranowski, Markus Sensors, Vol. 10, Issue 11 https://doi.org/10.3390/s101109847	journal	November 2010
Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition Lewis, Brett B.; Stanford, Michael G.; Fowlkes, Jason D. Beilstein Journal of Nanotechnology, Vol. 6 https://doi.org/10.3762/bjnano.6.94	journal	January 2015
Magnetic properties of optimized cobalt nanospheres grown by focused electron beam induced deposition (FEBID) on cantilever tips Sangiao, Soraya; Magén, César; Mofakhami, Darius Beilstein Journal of Nanotechnology, Vol. 8 https://doi.org/10.3762/bjnano.8.210	journal	January 2017
Magnetic characterization of cobalt nanowires and square nanorings fabricated by focused electron beam induced deposition Venturi, Federico; Gazzadi, Gian Carlo; Tavabi, Amir H. Beilstein Journal of Nanotechnology, Vol. 9 https://doi.org/10.3762/bjnano.9.97	journal	January 2018
Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition Guo, Dengji; Kometani, Reo; Warisawa, Shin'ichi Japanese Journal of Applied Physics, Vol. 51, Issue 6R https://doi.org/10.7567/JJAP.51.065001	journal	June 2012

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