Synthesis and electroplating of high resolution insulated carbon nanotube scanning probes for imaging in liquid solutions

Journal Article · Wed Mar 21 00:00:00 EDT 2012 · Nanotechnology

DOI:https://doi.org/10.1088/0957-4484/23/14/145301· OSTI ID:1364263

Roberts, Nicholas A. ^[1]; Noh, Joo Hyon ^[1]; Lassiter, M. G. ^[2]; Guo, S. ^[3]; Kalinin, Sergei V. ^[3]; Rack, Philip D. ^[4]

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1. Univ. of Tennessee, Knoxville, TN (United States). Dept. of Materials Science and Engineering
2. Aegis Technologies, Huntsville, AL (United States)
3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science
4. Univ. of Tennessee, Knoxville, TN (United States). Dept. of Materials Science and Engineering; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science

High resolution and isolated scanning probe microscopy (SPM) is in demand for continued development of energy storage and conversion systems involving chemical reactions at the nanoscale as well as an improved understanding of biological systems. We can use carbon nanotubes (CNTs) have large aspect ratios and, if leveraged properly, to develop high resolution SPM probes. Isolation of SPM probes can be achieved by depositing a dielectric film and selectively etching at the apex of the probe. Here, the fabrication of a high resolution and isolated SPM tip is demonstrated using electron beam induced etching of a dielectric film deposited onto an SPM tip with an attached CNT at the apex.

• Research Organization: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
• DOE Contract Number: AC05-00OR22725
• OSTI ID: 1364263
• Journal Information: Nanotechnology, Journal Name: Nanotechnology Journal Issue: 14 Vol. 23; ISSN 0957-4484
• Publisher: IOP Publishing
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY