3D nanoprinting via focused electron beams

Winkler, R.; Fowlkes, J. D.; Rack, P. D.; Plank, H.

doi:10.1063/1.5092372

Title: 3D nanoprinting via focused electron beams

Journal Article · Thu Jun 06 00:00:00 EDT 2019 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.5092372· OSTI ID:1543209

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Graz Univ. of Technology (Austria)
Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Additive manufacturing of three-dimensional objects on the nanoscale is a very relevant topic but still a highly challenging task. Among the pool of nanofabrication techniques, focused electron beam induced deposition (FEBID) has recently developed from a trial-and-error laboratory method to a predictable 3D nanoprinting technology with unique advantages. This perspective article first introduces the basic principles of 3D-FEBID, followed by an overview of historical developments with a particular emphasis on the last three years. In this work, we examine different aspects of 3D nanoprinting such as the instrumental setup, fundamental growth mechanisms, simulations, computer aided design software solutions, material properties, and application studies. For each aspect, the individual challenges and limitations are reported on. Additionally, we share our outlook about possible solutions and studies currently under investigation. As a perspective, we also address the most urgent milestones of the future and speculate on applications ranging from optics to mechanics, magnetics, and electronics, all of them benefiting from the recently improved 3D FEBID synthesis technique.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division; National Science Foundation (NSF); Austrian Cooperative Research (ACR); Christian Doppler Research Association (CDL-DEFINE)

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1543209

Journal Information:: Journal of Applied Physics, Vol. 125, Issue 21; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 72 works

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Simulation Informed CAD for 3D Nanoprinting Fowlkes, Jason D.; Winkler, Robert; Mutunga, Eva Micromachines, Vol. 11, Issue 1 https://doi.org/10.3390/mi11010008	journal	December 2019
Temperature-Dependent Growth Characteristics of Nb- and CoFe-Based Nanostructures by Direct-Write Using Focused Electron Beam-Induced Deposition Huth, Michael; Porrati, Fabrizio; Gruszka, Peter Micromachines, Vol. 11, Issue 1 https://doi.org/10.3390/mi11010028	journal	December 2019
Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review Plank, Harald; Winkler, Robert; Schwalb, Christian H. Micromachines, Vol. 11, Issue 1 https://doi.org/10.3390/mi11010048	journal	December 2019
Nanofabrication for all-soft and high-density electronic devices based on liquid metal Kim, Min-gu; Brown, Devin K.; Brand, Oliver Nature Communications, Vol. 11, Issue 1 https://doi.org/10.1038/s41467-020-14814-y	journal	February 2020
Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities Späth, Andreas Micromachines, Vol. 10, Issue 12 https://doi.org/10.3390/mi10120834	journal	November 2019

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