Beta gallium oxide (β-Ga2O3) nanoelectromechanical transducer for dual-modality solar-blind ultraviolet light detection

Zheng, Xu-Qian; Xie, Yong; Lee, Jaesung; Jia, Zhitai; Tao, Xutang; Feng, Philip X. -L.

doi:10.1063/1.5054625

Title: Beta gallium oxide (β-Ga₂O₃) nanoelectromechanical transducer for dual-modality solar-blind ultraviolet light detection

Journal Article · Fri Jan 25 00:00:00 EST 2019 · APL Materials

DOI:https://doi.org/10.1063/1.5054625· OSTI ID:1613385

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Case Western Reserve Univ., Cleveland, OH (United States)
Case Western Reserve Univ., Cleveland, OH (United States); Xidian Univ., Xi'an (China)
Shandong Univ. (China)

Empowered by an ultrawide bandgap (E_g = 4.5–4.9 eV), beta gallium oxide (β-Ga₂O₃) crystal is an ideal material for solar-blind ultraviolet (SBUV, λ < 280 nm) detection. Here, we report on the first demonstration of dual-modality SBUV light sensing integrated in the same device enabled by multi-physics coupling across photo-electrical and photo-thermo-mechanical domains. The specially designed suspended β-Ga₂O₃ nanoelectromechanical systems (NEMS) transducer reveals dual-modality responses, with a photocurrent responsivity of 4 mA/W and a frequency shift responsivity of 250 Hz/nW, upon SBUV light exposure. An additional demonstration of a β-Ga₂O₃ photo-field-effect transistor exhibits a boosted responsivity of 63 A/W. Analysis on the device suggests that reducing the thickness and length of the transducer could further improve the SBUV light sensing responsivities for both modalities. The demonstration could pave the way for future realization of SBUV detectors with dual modalities for enhanced detection fidelity, or respectively optimized for different sensing scenarios.

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Research Organization:: Case Western Reserve Univ., Cleveland, OH (United States)

Sponsoring Organization:: USDOE Office of Energy Efficiency and Renewable Energy (EERE); US Army Research Office (ARO); National Science Foundation (NSF)

Grant/Contract Number:: EE0006719; W911NF-16-1-0340; CMMI-1246715

OSTI ID:: 1613385

Journal Information:: APL Materials, Vol. 7, Issue 2; ISSN 2166-532X

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 14 works

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Title: Beta gallium oxide (β-Ga₂O₃) nanoelectromechanical transducer for dual-modality solar-blind ultraviolet light detection