Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures

Michaels, Julian A.; Wood, Derek R.; Froeter, Paul J.; Huang, Wen; Sievers, Dane J.; Li, Xiuling

doi:10.1002/admi.201901022

Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures

Journal Article · Sun Sep 08 00:00:00 EDT 2019 · Advanced Materials Interfaces

DOI:https://doi.org/10.1002/admi.201901022· OSTI ID:1607419

^[1]; Wood, Derek R. ^[2]; Froeter, Paul J. ^[2]; Huang, Wen ^[2]; Sievers, Dane J. ^[2]; ^[2]

Univ. of Illinois at Urbana-Champaign, IL (United States); University of Illinois at Urbana-Champaign
Univ. of Illinois at Urbana-Champaign, IL (United States)

Strain-induced self-rolled-up membranes (S-RuM) are structures formed spontaneously by releasing a strained layer or layer stacks from its mechanical support, with unique applications in passive photonics, electronics, and bioengineering. Depending on the thermal properties of the strained layers, these structures can experience various thermally induced deformations. These deformations can be avoided and augmented with the addition of strategically placed perforations in the membrane. This study reports on the use of perforations to modify the thermal effects on strained silicon nitride S-RuM structures. Finally, a programmable fuse with well-defined thermal threshold, ultrasmall footprint, and 2-3 V voltage rating is demonstrated, which can potentially serve as an on-chip sensing device for power electronic circuits.

View Accepted Manuscript (DOE)

Research Organization:: Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Organization:: National Science Foundation (NSF); USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22); USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division

Grant/Contract Number:: FG02-07ER46471

OSTI ID:: 1607419

Alternate ID(s):: OSTI ID: 1560747

Journal Information:: Advanced Materials Interfaces, Journal Name: Advanced Materials Interfaces Journal Issue: 21 Vol. 6; ISSN 2196-7350

Publisher:: Wiley-VCHCopyright Statement

Country of Publication:: United States

Language:: English

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36 MATERIALS SCIENCE
perforation
self-rolled-up membrane
silicon nitride membrane
thermal breakdown

Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures

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