Nanostructured substrates for improved lift-off of III-V thin films
Patent
·
OSTI ID:1576402
Reusable nanostructured substrates for forming semiconductor thin films, such as those used in solar cells, are configured with nanopillars to permit improved lift-off of thin films.
- Research Organization:
- Arizona State Univ., Scottsdale, AZ (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- EE0007369
- Assignee:
- Arizona Board of Regents on behalf of Arizona State University (Scottsdale, AZ)
- Patent Number(s):
- 10,403,783
- Application Number:
- 16/261,027
- OSTI ID:
- 1576402
- Country of Publication:
- United States
- Language:
- English
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