Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Novel Applications of the Multi-Beam SEM [Abstract Only]

Technical Report ·
DOI:https://doi.org/10.2172/1562396· OSTI ID:1562396

The Zeiss Multi-Beam Scanning Electron Microscope (MultiSEM) was used to image a wide array samples using non-standard operating conditions. The ability of this new, high-throughput imaging technique to produce high-quality images was assessed during this one year LDRD. In addition to exploring new imaging conditions, sample preparation techniques, coupled with theoretical simulations, were explored to optimize the MultiSEM images. To obtain details about the devices imaged, as well as the experimental details, please refer to the classified report from the project manager, Bradley Gabel, or the Cyber IA lead, Justin Ford.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA); USDOE Laboratory Directed Research and Development (LDRD) Program
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1562396
Report Number(s):
SAND--2016-9109; 647407
Country of Publication:
United States
Language:
English

Similar Records

Novel Techniques for Silicon Doping Profiling (U)
Technical Report · Thu Sep 01 00:00:00 EDT 2016 · OSTI ID:1733248

Novel Applications of Scanning Ultrafast Electron Microscopy (SUEM)
Technical Report · Sun Sep 01 00:00:00 EDT 2019 · OSTI ID:1564040

Novel Applications of Near-Field Scanning Optical Microscopy (NSOM)
Technical Report · Sat Sep 01 00:00:00 EDT 2018 · OSTI ID:1475250