Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

Shu, Deming; Maser, Jorg M.; Lai, Barry; Vogt, Franz Stefan; Holt, Martin V.; Preissner, Curt A.; Winarski, Robert P.; Stephenson, Gregory B.

Title: Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

Patent · Tue Feb 19 00:00:00 EST 2008

OSTI ID:1531548

Shu, Deming; Maser, Jorg M.; Lai, Barry; Vogt, Franz Stefan; Holt, Martin V.; Preissner, Curt A.; Winarski, Robert P.; Stephenson, Gregory B.

A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: W-31-109-ENG-38

Assignee:: UChicago Argonne, LLC (Chicago, IL)

Patent Number(s):: 7,331,714

Application Number:: 11/238,196

OSTI ID:: 1531548

Resource Relation:: Patent File Date: 2005-09-29

Country of Publication:: United States

Language:: English

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Cited By (4)

Optical module for X-ray microscope Hwu, En-Te https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9075245 US Patent Document 9,075,245	patent	July 2015
High precision detector robot arm system Shu, Deming; Chu, Yong S. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9557282 US Patent Document 9,557,282	patent	January 2017
Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution Shu, Deming; Maser, Jorg M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7994688 US Patent Document 7,994,688	patent	August 2011
Precision mechanical structure of an ultra-high-resolution spectrometer for inelastic X-ray scattering instrument Shu, Deming; Shvydko, Yuri; Stoupin, Stanislav https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9008272 US Patent Document 9,008,272	patent	April 2015

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