Design for an X-ray Nanoprobe Prototype with a Sub-10-nm Positioning Requirement

Journal Article · Wed May 12 04:00:00 EDT 2004 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.1758036· OSTI ID:20652863

Shu, D; Lai, B; Vogt, S ^[1]; Maser, J ^[2]

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1. Experimental Facilities Division, Argonne National Laboratory, Argonne, IL 60439 (United States)
2. Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439 (United States)

We are developing a new hard x-ray nanoprobe beamline with 30 nm resolution at the Advanced Photon Source (APS). Imaging and spectroscopy at this resolution level require staging of x-ray optics and specimens with a mechanical repeatability of better than 10 nm. We have developed a prototype instrument with a novel interferometrically controlled scanning stage system. The system consists of nine DC-motor-driven stages, four picomotor-driven stages, and two PZT-driven stages. An APS-designed custom-built laser Doppler displacement meter system provides two-dimensional differential displacement measurement with subnanometer resolution between the zone-plate x-ray optics and the sample holder. Also included is the alignment and stable positioning of two stacked zone plates for increasing the focusing efficiency. The entire scanning system was designed with high stiffness, high repeatability, low drift, flexible scanning schemes, and possibility of fast feedback for differential motion. Designs of the scanning stage system, as well as preliminary mechanical test results, are presented in this paper.

• OSTI ID: 20652863
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 705; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ADVANCED PHOTON SOURCE
BEAM OPTICS
CONTROL SYSTEMS
EFFICIENCY
FEEDBACK
FLEXIBILITY
FOCUSING
HARD X RADIATION
IMAGES
MECHANICAL TESTS
METERS
PLATES
POSITIONING
PROBES
PZT
RESOLUTION
SAMPLE HOLDERS
SPECTROSCOPY
TWO-DIMENSIONAL CALCULATIONS
ZONES