Optomechanical design of a hard x-ray nanoprobe instrument with active vibration control in nanometer scale.

Conference · Mon Jan 01 04:00:00 EST 2007

OSTI ID:967251

Shu, D; Maser, J; Holt, M; Winarski, R; Preissner, C; Smolyanitskiy, A; Lai, B; Vogt, S; Stephenson, G

We are developing a new hard x-ray nanoprobe instrument that is one of the centerpieces of the characterization facilities of the Center for Nanoscale Materials being constructed at Argonne National Laboratory. This new probe will cover an energy range of 3-30 keV with 30-nm spatial resolution. The system is designed to accommodate x-ray optics with a resolution limit of 10 nm, therefore, it requires staging of x-ray optics and specimens with a mechanical repeatability of better than 5 nm. Fast feedback for differential vibration control between the zone-plate x-ray optics and the sample holder has been implemented in the design using a digital-signal-processor-based real-time closed-loop feedback technique. A specially designed, custom-built laser Doppler displacement meter system provides two-dimensional differential displacement measurements with subnanometer resolution between the zone-plate x-ray optics and the sample holder. The optomechanical design of the instrument positioning stage system with nanometer-scale active vibration control is presented in this paper.

• Research Organization: Argonne National Laboratory (ANL)
• Sponsoring Organization: SC
• DOE Contract Number: AC02-06CH11357
• OSTI ID: 967251
• Report Number(s): ANL/AOD/CP-117745
• Country of Publication: United States
• Language: ENGLISH

Related Subjects

43 PARTICLE ACCELERATORS
ANL
DESIGN
ENERGY RANGE
FEEDBACK
LASERS
METERS
OPTICS
POSITIONING
PROBES
RESOLUTION
SAMPLE HOLDERS
SPATIAL RESOLUTION
SYNCHROTRON RADIATION