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Title: Ultra-hard low friction coating based on A1MgB.sub.14 for reduced wear of MEMS and other tribological components and system

Abstract

Performance and reliability of microelectromechanical system (MEMS) components enhanced dramatically through the incorporation of protective thin film coatings. Current-generation MEMS devices prepared by the LIGA technique employ transition metals such as Ni, Cu, Fe, or alloys thereof, and hence lack stability in oxidizing, corrosive, and/or high temperature environments. Fabrication of a superhard, self-lubricating coating based on a ternary boride compound AlMgB.sub.14 is described in this letter as a potential breakthrough in protective coating technology for LIGA microdevices. Nanoindentation tests show that hardness of AlMgB.sub.14 films prepared by pulsed laser deposition ranges from 45 GPa to 51 GPa, when deposited at room temperature and 573 K, respectively. Extremely low friction coefficients of 0.04-0.05, which are thought to result from a self-lubricating effect, have also been confirmed by nanoscratch tests on the AlMgB.sub.14 films. Transmission electron microscopy studies show that the as-deposited films are amorphous, regardless of substrate temperature; however, analysis of FTIR spectra suggests that the higher substrate temperature facilitates formation of the B.sub.12 icosahedral framework, therefore leading to the higher hardness.

Inventors:
; ; ; ; ;
Publication Date:
Research Org.:
Iowa State Univ. Research Foundation, Inc., Ames, IA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531533
Patent Number(s):
7,238,429
Application Number:
10/946,051
Assignee:
Iowa State University Research Foundation, Inc. (Ames, IA)
DOE Contract Number:  
W-7405-ENG-82; NSF-DMI-0084969
Resource Type:
Patent
Resource Relation:
Patent File Date: 2004-09-21
Country of Publication:
United States
Language:
English

Citation Formats

Cook, Bruce Allan, Tian, Yun, Harringa, Joel Lee, Constant, Alan Paul, Russell, Alan Mark, and Molian, Palaniappa A. Ultra-hard low friction coating based on A1MgB.sub.14 for reduced wear of MEMS and other tribological components and system. United States: N. p., 2007. Web.
Cook, Bruce Allan, Tian, Yun, Harringa, Joel Lee, Constant, Alan Paul, Russell, Alan Mark, & Molian, Palaniappa A. Ultra-hard low friction coating based on A1MgB.sub.14 for reduced wear of MEMS and other tribological components and system. United States.
Cook, Bruce Allan, Tian, Yun, Harringa, Joel Lee, Constant, Alan Paul, Russell, Alan Mark, and Molian, Palaniappa A. Tue . "Ultra-hard low friction coating based on A1MgB.sub.14 for reduced wear of MEMS and other tribological components and system". United States. https://www.osti.gov/servlets/purl/1531533.
@article{osti_1531533,
title = {Ultra-hard low friction coating based on A1MgB.sub.14 for reduced wear of MEMS and other tribological components and system},
author = {Cook, Bruce Allan and Tian, Yun and Harringa, Joel Lee and Constant, Alan Paul and Russell, Alan Mark and Molian, Palaniappa A.},
abstractNote = {Performance and reliability of microelectromechanical system (MEMS) components enhanced dramatically through the incorporation of protective thin film coatings. Current-generation MEMS devices prepared by the LIGA technique employ transition metals such as Ni, Cu, Fe, or alloys thereof, and hence lack stability in oxidizing, corrosive, and/or high temperature environments. Fabrication of a superhard, self-lubricating coating based on a ternary boride compound AlMgB.sub.14 is described in this letter as a potential breakthrough in protective coating technology for LIGA microdevices. Nanoindentation tests show that hardness of AlMgB.sub.14 films prepared by pulsed laser deposition ranges from 45 GPa to 51 GPa, when deposited at room temperature and 573 K, respectively. Extremely low friction coefficients of 0.04-0.05, which are thought to result from a self-lubricating effect, have also been confirmed by nanoscratch tests on the AlMgB.sub.14 films. Transmission electron microscopy studies show that the as-deposited films are amorphous, regardless of substrate temperature; however, analysis of FTIR spectra suggests that the higher substrate temperature facilitates formation of the B.sub.12 icosahedral framework, therefore leading to the higher hardness.},
doi = {},
url = {https://www.osti.gov/biblio/1531533}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {7}
}

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Works referencing / citing this record:

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