LDRD Project 52523 final report :Atomic layer deposition of highly conformal tribological coatings.
- University of Minnesota
- University of Colorado
Friction and wear are major concerns in the performance and reliability of micromechanical (MEMS) devices. While a variety of lubricant and wear resistant coatings are known which we might consider for application to MEMS devices, the severe geometric constraints of many micromechanical systems (high aspect ratios, shadowed surfaces) make most deposition methods for friction and wear-resistance coatings impossible. In this program we have produced and evaluate highly conformal, tribological coatings, deposited by atomic layer deposition (ALD), for use on surface micromachined (SMM) and LIGA structures. ALD is a chemical vapor deposition process using sequential exposure of reagents and self-limiting surface chemistry, saturating at a maximum of one monolayer per exposure cycle. The self-limiting chemistry results in conformal coating of high aspect ratio structures, with monolayer precision. ALD of a wide variety of materials is possible, but there have been no studies of structural, mechanical, and tribological properties of these films. We have developed processes for depositing thin (<100 nm) conformal coatings of selected hard and lubricious films (Al2O3, ZnO, WS2, W, and W/Al{sub 2}O{sub 3} nanolaminates), and measured their chemical, physical, mechanical and tribological properties. A significant challenge in this program was to develop instrumentation and quantitative test procedures, which did not exist, for friction, wear, film/substrate adhesion, elastic properties, stress, etc., of extremely thin films and nanolaminates. New scanning probe and nanoindentation techniques have been employed along with detailed mechanics-based models to evaluate these properties at small loads characteristic of microsystem operation. We emphasize deposition processes and fundamental properties of ALD materials, however we have also evaluated applications and film performance for model SMM and LIGA devices.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 875621
- Report Number(s):
- SAND2005-5742
- Country of Publication:
- United States
- Language:
- English
Similar Records
Mechanics and tribology of MEMS materials.
W-Coating for MEMS
Selective W for coating and releasing MEMS devices
Technical Report
·
Wed Mar 31 23:00:00 EST 2004
·
OSTI ID:918765
W-Coating for MEMS
Conference
·
Thu Jul 08 00:00:00 EDT 1999
·
OSTI ID:8951
Selective W for coating and releasing MEMS devices
Conference
·
Mon Jan 03 23:00:00 EST 2000
·
OSTI ID:750235