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U.S. Department of Energy
Office of Scientific and Technical Information

Sustaining Moore's Law with 3D Chips.

Conference ·
Abstract not provided.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1506585
Report Number(s):
SAND2017-7069C; 655057
Country of Publication:
United States
Language:
English

Cited By (3)

Metrology for the next generation of semiconductor devices journal October 2018
Micro/Nanoscale 3D Assembly by Rolling, Folding, Curving, and Buckling Approaches journal June 2019
Ultra-thin chips for high-performance flexible electronics journal March 2018

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