Sustaining Moore's Law with 3D Chips.
- Qualcomm
- SRC
- Georgia Tech
- IRDS
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1506585
- Report Number(s):
- SAND2017-7069C; 655057
- Country of Publication:
- United States
- Language:
- English
Metrology for the next generation of semiconductor devices
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Ultra-thin chips for high-performance flexible electronics
|
journal | March 2018 |
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