Design, Fabrication and Characterization of a Miniaturized Series-Connected Potentiometric Oxygen Sensor

Journal Article · Mon Mar 28 00:00:00 EST 2005 · Sensors and Actuators. B, Chemical, 105(2):312–321

DOI:https://doi.org/10.1016/S0925-4005(04)00452-6· OSTI ID:15020534

Radhakrishnan, Rajesh; Virkar, Anil V.; Singhal, Subhash C.; Dunham, Glen C.; Marina, Olga A.

Miniaturization of potentiometric sensors facilitates connecting many sensors in series to amplify the output. Miniaturized series-connected potentiometric sensors were developed on a silicon wafer by microfabrication techniques. The sensors consist of a thin film yttria stabilized zirconia (YSZ) electrolyte and Pt electrodes. The reference oxygen partial pressure is determined by a nickel - nickel oxide (Ni-NiO) mixture. The open circuit voltage (OCV) was tested in air at 300oC and was found to be lower than expected. The output of the net sensor increased almost linearly by connecting 10 sensors in series. Impedance spectroscopy was used to investigate the electrolyte and electrolyte/electrode interfaces using a two electrode configuration.

• Research Organization: Pacific Northwest National Laboratory (PNNL), Richland, WA (US), Environmental Molecular Sciences Laboratory (EMSL)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC05-76RL01830
• OSTI ID: 15020534
• Report Number(s): PNNL-SA-40552; 2233; AA2530000; TRN: US200521%%40
• Journal Information: Sensors and Actuators. B, Chemical, 105(2):312–321, Vol. 105, Issue 2
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
POTENTIOMETRY
MINIATURIZATION
DESIGN
OXYGEN
PARTIAL PRESSURE
THIN FILMS
NICKEL
NICKEL OXIDES
OPERATION
MONITORING
potentiometric oxygen sensor
yttria stabilized zirconia
nickel-nickel oxide
platinum
microfabrication
impedance spectroscopy
Environmental Molecular Sciences Laboratory