Design, Fabrication and Characterization of a Miniaturized Series-Connected Potentiometric Oxygen Sensor

Journal Article · Sun Mar 27 23:00:00 EST 2005 · Sensors and Actuators. B, Chemical, 105(2):312–321

DOI:https://doi.org/10.1016/S0925-4005(04)00452-6· OSTI ID:15020534

Radhakrishnan, Rajesh; Virkar, Anil V.; Singhal, Subhash C.; Dunham, Glen C.; Marina, Olga A.

Miniaturization of potentiometric sensors facilitates connecting many sensors in series to amplify the output. Miniaturized series-connected potentiometric sensors were developed on a silicon wafer by microfabrication techniques. The sensors consist of a thin film yttria stabilized zirconia (YSZ) electrolyte and Pt electrodes. The reference oxygen partial pressure is determined by a nickel - nickel oxide (Ni-NiO) mixture. The open circuit voltage (OCV) was tested in air at 300oC and was found to be lower than expected. The output of the net sensor increased almost linearly by connecting 10 sensors in series. Impedance spectroscopy was used to investigate the electrolyte and electrolyte/electrode interfaces using a two electrode configuration.

• Research Organization: Pacific Northwest National Laboratory (PNNL), Richland, WA (US), Environmental Molecular Sciences Laboratory (EMSL)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC05-76RL01830
• OSTI ID: 15020534
• Report Number(s): PNNL-SA-40552; 2233; AA2530000
• Journal Information: Sensors and Actuators. B, Chemical, 105(2):312–321, Journal Name: Sensors and Actuators. B, Chemical, 105(2):312–321 Journal Issue: 2 Vol. 105
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
DESIGN
Environmental Molecular Sciences Laboratory
MINIATURIZATION
MONITORING
NICKEL
NICKEL OXIDES
OPERATION
OXYGEN
PARTIAL PRESSURE
POTENTIOMETRY
THIN FILMS
impedance spectroscopy
microfabrication
nickel-nickel oxide
platinum
potentiometric oxygen sensor
yttria stabilized zirconia