Design, Fabrication and Characterization of a Miniaturized Series-Connected Potentiometric Oxygen Sensor

Journal Article · Sat Jul 24 00:00:00 EDT 2004 · Sensors and Actuators. B, Chemical

OSTI ID:15020744

Radhakrishnan, Rajesh; Virkar, Anil V; Singhal, Subhash C; Dunham, Glen C; Marina, Olga A

Miniaturization of potentiometric sensors facilitates connecting many sensors in series to amplify the output. Miniaturized series-connected potentiometric sensors were developed on silicon (Si) wafer by microfabrication techniques. The sensors consist of a thin nickel-nickel oxide (Ni-NiO) mixture. The open circuit voltage (OCV) was tested in air at 300 C and was found to be lower than expected. The output of the net sensor increased almost linearly by connecting 10 sensors in series. Impedance spectroscopy was used to investigate the electrolyte and electrolyte-electrode interfaces using a two electrode configuration.

• Research Organization: Pacific Northwest National Laboratory (PNNL), Richland, WA (US)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC05-76RL01830
• OSTI ID: 15020744
• Report Number(s): PNNL-SA-46406; AA2525000
• Journal Information: Sensors and Actuators. B, Chemical, Journal Name: Sensors and Actuators. B, Chemical Vol. 105
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
47 OTHER INSTRUMENTATION
DESIGN
DETECTION
FABRICATION
Impedance spectroscopy
MINIATURIZATION
Microfabrication
NICKEL
NICKEL OXIDES
Nickel-nickel oxide
OXYGEN
POTENTIOMETERS
POTENTIOMETRY
Platinum
Yttria stabilized zirconia
potentiometric oxygen sensor