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REDUCTION OF RESISTIVITY IN CU THIN FILMS BY PARTIAL OXIDIATION: MICROSTRUCTURAL MECHANISMS

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.1691500· OSTI ID:15015733

No abstract prepared.

Research Organization:
Brookhaven National Laboratory, National Synchrotron Light Source (US)
Sponsoring Organization:
DOE/OFFICE OF SCIENCE (US)
DOE Contract Number:
AC02-98CH10886
OSTI ID:
15015733
Report Number(s):
BNL--74522-2005-JA
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 84; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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