Soft x-ray optical constants of sputtered chromium thin films with improved accuracy in the L and M absorption edge regions

Delmotte, Franck; Meyer-Ilse, Julia; Salmassi, Farhad; Soufli, Regina; Burcklen, Catherine; Rebellato, Jennifer; Jérome, Arnaud; Vickridge, Ian; Briand, Emrick; Gullikson, Eric

doi:10.1063/1.5027488

Soft x-ray optical constants of sputtered chromium thin films with improved accuracy in the L and M absorption edge regions

Journal Article · Thu Jul 19 00:00:00 EDT 2018 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.5027488· OSTI ID:1482536

Delmotte, Franck ^[1]; Meyer-Ilse, Julia ^[2]; Salmassi, Farhad ^[2]; Soufli, Regina ^[3]; Burcklen, Catherine ^[4]; Rebellato, Jennifer ^[5]; Jérome, Arnaud ^[5]; ^[6]; Briand, Emrick ^[6]; Gullikson, Eric ^[2]

Universite Paris-Saclay (France). Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS; Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-ray Optics
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-ray Optics
Universite Paris-Saclay (France). Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS; Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Universite Paris-Saclay (France). Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS
Institut des NanoSciences de Paris (France)

In this paper, we determine with improved accuracy the complex index of refraction n = 1 - δ + iβ of sputtered chromium thin films for photon energies ranging from 25 eV to 813 eV. These data include the first absolute measurements of the absorption fine structure near the Cr-L edge. First, we verified by combining Rutherford Backscattering Spectrometry and grazing-incidence x-ray reflectometry that the sputtered thin films were pure Cr with a density consistent with tabulated values. Then, we demonstrated that the Cr surface oxide layer remains stable when the samples are exposed to air for up to 4 years. The Cr absorption coefficient β was determined from the transmittance of freestanding Cr thin films with various thicknesses, measured at the ALS synchrotron radiation source. A model is proposed to correct the transmittance data from the spectral contamination of the source. Finally, we used the new β values, combined with theoretical and tabulated data from the literature, in order to calculate the δ values by the Kramers-Kronig relation. The improvement in the accuracy of β values is demonstrated by the f-sum rule. Finally, an additional validation of the new Cr optical constants (δ, β) is performed by comparing the simulated and experimental reflectance of a Cr/B₄C multilayer mirror near the Cr-L_2,3 edge.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States); Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC)

Grant/Contract Number:: AC02-05CH11231; AC52-07NA27344

OSTI ID:: 1482536

Alternate ID(s):: OSTI ID: 1527275

Report Number(s):: LLNL-JRNL--768637; ark:/13030/qt0b28x4nt

Journal Information:: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 3 Vol. 124; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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Optical constants of sputtered beryllium thin films determined from photoabsorption measurements in the spectral range 20.4–250 eV Svechnikov, Mikhail; Chkhalo, Nikolay; Lopatin, Alexey Journal of Synchrotron Radiation, Vol. 27, Issue 1 https://doi.org/10.1107/s1600577519014188	journal	January 2020

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