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Optical constants of magnetron sputtered aluminum in the range 17–1300 eV with improved accuracy and ultrahigh resolution in the L absorption edge region

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/5.0233781· OSTI ID:2481489
 [1];  [2];  [1];  [3];  [3];  [1]
  1. Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
  2. Univ. Paris-Saclay, Palaiseau (France); Centre National de la Recherche Scientifique (CNRS) (France)
  3. Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
+ Show Author Affiliations
This work determines a new set of EUV/x-ray optical constants for aluminum (Al), one of the most important materials in science and technology. Absolute photoabsorption (transmittance) measurements in the 17–1300 eV spectral range were performed on freestanding Al films protected by carbon (C) layers, to prevent oxidation. The dispersive portion of the refractive index was obtained via the Kramers–Kronig transformation. Our data provide significant improvements in accuracy compared to previously tabulated values and reveal fine structure in the Al L1 and L2,3 regions, with photon energy step sizes as small as 0.02 eV. The implications of this work in the successful realization of EUV/x-ray instruments and in the validation of atomic and molecular physics models are also discussed.
Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States); Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE Laboratory Directed Research and Development (LDRD) Program; USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
AC02-05CH11231; AC52-07NA27344
OSTI ID:
2481489
Alternate ID(s):
OSTI ID: 2496855
Report Number(s):
LLNL--JRNL-867108; ark:/13030/qt42q6h3gj
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 19 Vol. 136; ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)Copyright Statement
Country of Publication:
United States
Language:
English

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Related Subjects

74 ATOMIC AND MOLECULAR PHYSICS
Aluminium
Atomic and molecular physics
Extreme ultraviolet radiation
Near edge X-ray absorption fine structure spectroscopy
Optical constants
Optical properties
Photoabsorption
Thin films
X-ray instruments
X-rays