Processing-dependent thermal stability of a prototypical amorphous metal oxide

Zeng, Li; Moghadam, Mahyar M.; Buchholz, D. Bruce; Li, Ran; Keane, Denis T.; Dravid, Vinayak P.; Chang, Robert P.  H.; Voorhees, Peter W.; Marks, Tobin J.; Bedzyk, Michael J.

doi:10.1103/PhysRevMaterials.2.053401

Title: Processing-dependent thermal stability of a prototypical amorphous metal oxide

Journal Article · Tue May 01 00:00:00 EDT 2018 · Physical Review Materials

DOI:https://doi.org/10.1103/PhysRevMaterials.2.053401· OSTI ID:1471609

Zeng, Li; Moghadam, Mahyar M.; Buchholz, D. Bruce; Li, Ran; Keane, Denis T.; Dravid, Vinayak P.; Chang, Robert P. H.; Voorhees, Peter W.; Marks, Tobin J.; Bedzyk, Michael J.

Cite

Export

Save

Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)

Sponsoring Organization:: NSFINDUSTRY

OSTI ID:: 1471609

Journal Information:: Physical Review Materials, Vol. 2, Issue 5; ISSN 2475-9953

Publisher:: American Physical Society (APS)

Country of Publication:: United States

Language:: ENGLISH

References (44)

Nika : software for two-dimensional data reduction Ilavsky, Jan Journal of Applied Crystallography, Vol. 45, Issue 2 https://doi.org/10.1107/S0021889812004037	journal	March 2012
Simulation of phase transformation kinetics in thin films under a constant nucleation rate Moghadam, M. M.; Pang, E. L.; Philippe, T. Thin Solid Films, Vol. 612 https://doi.org/10.1016/j.tsf.2016.06.035	journal	August 2016
Differences between amorphous indium oxide thin films Buchholz, D. Bruce; Zeng, Li; Bedzyk, Michael J. Progress in Natural Science: Materials International, Vol. 23, Issue 5 https://doi.org/10.1016/j.pnsc.2013.08.004	journal	October 2013
Highly Bendable In-Ga-ZnO Thin Film Transistors by Using a Thermally Stable Organic Dielectric Layer Kumaresan, Yogeenth; Pak, Yusin; Lim, Namsoo Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep37764	journal	November 2016
Oxygen “Getter” Effects on Microstructure and Carrier Transport in Low Temperature Combustion-Processed a-InXZnO (X = Ga, Sc, Y, La) Transistors Hennek, Jonathan W.; Smith, Jeremy; Yan, Aiming Journal of the American Chemical Society, Vol. 135, Issue 29 https://doi.org/10.1021/ja403586x	journal	July 2013
A study of low temperature crystallization of amorphous thin film indium–tin–oxide Paine, David C.; Whitson, T.; Janiac, D. Journal of Applied Physics, Vol. 85, Issue 12 https://doi.org/10.1063/1.370695	journal	June 1999
Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors Nomura, Kenji; Ohta, Hiromichi; Takagi, Akihiro Nature, Vol. 432, Issue 7016, p. 488-492 https://doi.org/10.1038/nature03090	journal	November 2004
Crystallization of Amorphous In ₂ O ₃ Films during Film Growth Muranaka, Shigetoshi Japanese Journal of Applied Physics, Vol. 30, Issue Part 2, No. 12A https://doi.org/10.1143/JJAP.30.L2062	journal	December 1991
The 2016 oxide electronic materials and oxide interfaces roadmap Lorenz, M.; Ramachandra Rao, M. S.; Venkatesan, T. Journal of Physics D: Applied Physics, Vol. 49, Issue 43 https://doi.org/10.1088/0022-3727/49/43/433001	journal	October 2016
Level-set simulation of anisotropic phase transformations via faceted growth Moghadam, M. M.; Voorhees, P. W. Computational Materials Science, Vol. 143 https://doi.org/10.1016/j.commatsci.2017.10.055	journal	February 2018
Cation Size Effects on the Electronic and Structural Properties of Solution-Processed In-X-O Thin Films Smith, Jeremy; Zeng, Li; Khanal, Rabi Advanced Electronic Materials, Vol. 1, Issue 7 https://doi.org/10.1002/aelm.201500146	journal	June 2015
The Structure and Properties of Amorphous Indium Oxide Buchholz, D. Bruce; Ma, Qing; Alducin, Diego Chemistry of Materials, Vol. 26, Issue 18 https://doi.org/10.1021/cm502689x	journal	September 2014
Transparent Semiconducting Oxide Technology for Touch Free Interactive Flexible Displays Proceedings of the IEEE, Vol. 103, Issue 4 https://doi.org/10.1109/JPROC.2015.2405767	journal	April 2015
Crystallization process and electro-optical properties of In2O3 and ITO thin films Adurodija, Frederick Ojo; Semple, Lynne; Brüning, Ralf Journal of Materials Science, Vol. 41, Issue 21 https://doi.org/10.1007/s10853-006-0038-3	journal	November 2006
Material characteristics and applications of transparent amorphous oxide semiconductors Kamiya, Toshio; Hosono, Hideo NPG Asia Materials, Vol. 2, Issue 1 https://doi.org/10.1038/asiamat.2010.5	journal	January 2010
An ‘aqueous route’ for the fabrication of low-temperature-processable oxide flexible transparent thin-film transistors on plastic substrates Hwan Hwang, Young; Seo, Jin-Suk; Moon Yun, Je NPG Asia Materials, Vol. 5, Issue 4 https://doi.org/10.1038/am.2013.11	journal	April 2013
Recent Advances in Understanding the Structure and Properties of Amorphous Oxide Semiconductors Medvedeva, Julia E.; Buchholz, D. Bruce; Chang, Robert P. H. Advanced Electronic Materials, Vol. 3, Issue 9 https://doi.org/10.1002/aelm.201700082	journal	August 2017
X-ray determination of crystallinity and diffuse disorder scattering Ruland, W. Acta Crystallographica, Vol. 14, Issue 11 https://doi.org/10.1107/S0365110X61003429	journal	November 1961
Metal oxides for optoelectronic applications Yu, Xinge; Marks, Tobin J.; Facchetti, Antonio Nature Materials, Vol. 15, Issue 4 https://doi.org/10.1038/nmat4599	journal	March 2016
Low-Temperature, Nontoxic Water-Induced Metal-Oxide Thin Films and Their Application in Thin-Film Transistors Liu, Guoxia; Liu, Ao; Zhu, Huihui Advanced Functional Materials, Vol. 25, Issue 17 https://doi.org/10.1002/adfm.201500056	journal	March 2015
xrayutilities : a versatile tool for reciprocal space conversion of scattering data recorded with linear and area detectors Kriegner, Dominik; Wintersberger, Eugen; Stangl, Julian Journal of Applied Crystallography, Vol. 46, Issue 4 https://doi.org/10.1107/S0021889813017214	journal	July 2013
Thermal stability of amorphous Zn-In-Sn-O films Proffit, Diana E.; Philippe, Thomas; Emery, Jonathan D. Journal of Electroceramics, Vol. 34, Issue 2-3 https://doi.org/10.1007/s10832-014-9967-4	journal	September 2014
Granulation, Phase Change, and Microstructure Kinetics of Phase Change. III Avrami, Melvin The Journal of Chemical Physics, Vol. 9, Issue 2, p. 177-184 https://doi.org/10.1063/1.1750872	journal	February 1941
Transparent Conducting Oxides: Electronic Structure-Property Relationship from Photoelectron Spectroscopy with in situ Sample Preparation Klein, Andreas Journal of the American Ceramic Society https://doi.org/10.1111/jace.12143	journal	December 2012
Modeling interface-controlled phase transformation kinetics in thin films Pang, E. L.; Vo, N. Q.; Philippe, T. Journal of Applied Physics, Vol. 117, Issue 17 https://doi.org/10.1063/1.4919725	journal	May 2015
A Level-Set Method for the Evolution of Faceted Crystals Russo, Giovanni; Smereka, Peter SIAM Journal on Scientific Computing, Vol. 21, Issue 6 https://doi.org/10.1137/S1064827599351921	journal	January 2000
An amorphous oxide semiconductor thin-film transistor route to oxide electronics Wager, John F.; Yeh, Bao; Hoffman, Randy L. Current Opinion in Solid State and Materials Science, Vol. 18, Issue 2 https://doi.org/10.1016/j.cossms.2013.07.002	journal	April 2014
Ultra-Flexible, “Invisible” Thin-Film Transistors Enabled by Amorphous Metal Oxide/Polymer Channel Layer Blends Yu, Xinge; Zeng, Li; Zhou, Nanjia Advanced Materials, Vol. 27, Issue 14 https://doi.org/10.1002/adma.201405400	journal	February 2015
Investigation of diffusion and crystallization processes in thin ITO films by temperature and time resolved grazing incidence X-ray diffractometry Quaas, M.; Steffen, H.; Hippler, R. Surface Science, Vol. 540, Issue 2-3 https://doi.org/10.1016/S0039-6028(03)00850-1	journal	August 2003
Structure, stability and work functions of the low index surfaces of pure indium oxide and Sn-doped indium oxide (ITO) from density functional theory Walsh, Aron; Catlow, C. Richard A. Journal of Materials Chemistry, Vol. 20, Issue 46 https://doi.org/10.1039/c0jm01816c	journal	January 2010
Present status of amorphous In–Ga–Zn–O thin-film transistors Kamiya, Toshio; Nomura, Kenji; Hosono, Hideo Science and Technology of Advanced Materials, Vol. 11, Issue 4 https://doi.org/10.1088/1468-6996/11/4/044305	journal	February 2010
Low-temperature, high-performance solution-processed metal oxide thin-film transistors formed by a ‘sol–gel on chip’ process Banger, K. K.; Yamashita, Y.; Mori, K. Nature Materials, Vol. 10, Issue 1, p. 45-50 https://doi.org/10.1038/nmat2914	journal	December 2010
In Situ Crystallization and Morphological Evolution in Multicomponent Indium Oxide Thin Films Moghadam, Mahyar M.; Li, Ran; Buchholz, D. Bruce Crystal Growth & Design, Vol. 17, Issue 3 https://doi.org/10.1021/acs.cgd.6b01849	journal	January 2017
Kinetics of Phase Change. I General Theory Avrami, Melvin The Journal of Chemical Physics, Vol. 7, Issue 12, p. 1103-1112 https://doi.org/10.1063/1.1750380	journal	December 1939
Oxide Semiconductor Thin-Film Transistors: A Review of Recent Advances Fortunato, E.; Barquinha, P.; Martins, R. Advanced Materials, Vol. 24, Issue 22 https://doi.org/10.1002/adma.201103228	journal	May 2012
Thin film phase transformation kinetics: From theory to experiment Moghadam, M. M.; Voorhees, P. W. Scripta Materialia, Vol. 124 https://doi.org/10.1016/j.scriptamat.2016.07.010	journal	November 2016
Transparent Conducting Oxides Ginley, David S.; Bright, Clark MRS Bulletin, Vol. 25, Issue 8 https://doi.org/10.1557/mrs2000.256	journal	August 2000
Metal Oxide Transistors via Polyethylenimine Doping of the Channel Layer: Interplay of Doping, Microstructure, and Charge Transport Huang, Wei; Zeng, Li; Yu, Xinge Advanced Functional Materials, Vol. 26, Issue 34 https://doi.org/10.1002/adfm.201602069	journal	June 2016
Relationship between electrical properties and crystallization of indium oxide thin films using ex-situ grazing-incidence wide-angle x-ray scattering González, G. B.; Okasinski, J. S.; Buchholz, D. B. Journal of Applied Physics, Vol. 121, Issue 20 https://doi.org/10.1063/1.4984054	journal	May 2017
Fast pole figure acquisition using area detectors at the DiffAbs beamline – Synchrotron SOLEIL Mocuta, Cristian; Richard, Marie-Ingrid; Fouet, Julie Journal of Applied Crystallography, Vol. 46, Issue 6 https://doi.org/10.1107/S0021889813027453	journal	November 2013
Polarization relaxation kinetics and 180° domain wall dynamics in ferroelectric thin films Ganpule, C. S.; Roytburd, A. L.; Nagarajan, V. Physical Review B, Vol. 65, Issue 1 https://doi.org/10.1103/PhysRevB.65.014101	journal	November 2001
Composition-dependent structural and transport properties of amorphous transparent conducting oxides Khanal, Rabi; Buchholz, D. Bruce; Chang, Robert P. H. Physical Review B, Vol. 91, Issue 20 https://doi.org/10.1103/PhysRevB.91.205203	journal	May 2015
Probing the Unique Role of Gallium in Amorphous Oxide Semiconductors through Structure-Property Relationships Moffitt, Stephanie L.; Zhu, Qimin; Ma, Qing Advanced Electronic Materials, Vol. 3, Issue 10 https://doi.org/10.1002/aelm.201700189	journal	September 2017
Preparation and Crystallization of Tin-doped and Undoped Amorphous Indium Oxide Films Deposited by Sputtering Song, Pung Keun; Akao, Hirotaka; Kamei, Masayuki Japanese Journal of Applied Physics, Vol. 38, Issue Part 1, No. 9A https://doi.org/10.1143/JJAP.38.5224	journal	September 1999

Similar Records

Processing-dependent thermal stability of a prototypical amorphous metal oxide

Journal Article · Tue May 15 00:00:00 EDT 2018 · Physical Review Materials · OSTI ID:1471609

Zeng, Li; Moghadam, Mahyar M.; Buchholz, D. Bruce; +7 more

Effects of temperature dependent pre-amorphization implantation on NiPt silicide formation and thermal stability on Si(100)

Journal Article · Mon Apr 29 00:00:00 EDT 2013 · Applied Physics Letters · OSTI ID:1471609

Ozcan, Ahmet S.; Wall, Donald; Jordan-Sweet, Jean; +1 more

Effects of Temperature Dependent Pre-amorphization Implantation on NiPt Silicide Formation and Thermal Stability on Si(100)

Journal Article · Wed May 01 00:00:00 EDT 2013 · Applied Physics Letters · OSTI ID:1471609

Ozcan, A; Wall, D; Jordan-Sweet, J; +1 more

Title: Processing-dependent thermal stability of a prototypical amorphous metal oxide

Citation Formats

References (44)

Similar Records

Related Subjects