Effects of Temperature Dependent Pre-amorphization Implantation on NiPt Silicide Formation and Thermal Stability on Si(100)
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE SC OFFICE OF SCIENCE (SC)
- DOE Contract Number:
- DE-AC02-98CH10886
- OSTI ID:
- 1109720
- Report Number(s):
- BNL-102854-2013-JA
- Journal Information:
- Applied Physics Letters, Vol. 102, Issue 17; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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