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Photoluminescence properties of strained molecular-beam epitaxy Si{sub 1-x}Ge{sub x}/Si multiquantum wells

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena
DOI:https://doi.org/10.1116/1.586733· OSTI ID:147038
; ;  [1]
  1. National Research Council Canada, Ontario (Canada); and others

Si{sub 1-x}Ge{sub x}/Si multiquantum well (MQW) structures grown by molecular-beam epitaxy exhibit a broad, intense photoluminescence (PL) peak {approximately} 120 meV below the band gap energy and/or phonon-resolved, near-band gap PL, depending on the MQW strain and the growth conditions. The origins of these two PL types have been identified. For MQWs with thin alloy layers (<40-100 {Angstrom}), the SiGe PL at 2 K is dominated by boron bound-exciton annihilation, which yields phonon-resolved transitions. For thicker layers, the PL is dominated by a broad, intense peak due to exciton recombination at small (<{approximately}15 {Angstrom}) interstitial-type platelets that occur in densities up to {approximately} 10{sup 9} cm{sup {minus}2}/QW. Etching experiments revealed that within a given MQW the platelet density is lowest in the first grown well and progressively increases in subsequent wells with increasing strain energy density, indicating that platelet formation is strictly a morphological phenomenon. 17 refs., 4 figs.

OSTI ID:
147038
Report Number(s):
CONF-9210296--
Journal Information:
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 3 Vol. 11; ISSN 0734-211X; ISSN JVTBD9
Country of Publication:
United States
Language:
English

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