Summary of Total Dose Testing on IBM Bottom Oxidation Through STI (BOTS) FinFETs [Slides]
State of the art semiconductor processes have created high performance and low power consumption technologies. There is a drive to use these technologies for commercial space, defense, and infrastructure.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000; NA0003525
- OSTI ID:
- 1467777
- Report Number(s):
- SAND--2018-9355R; 667354
- Country of Publication:
- United States
- Language:
- English
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