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Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS

Journal Article · · Surface and Interface Analysis
DOI:https://doi.org/10.1002/sia.6445· OSTI ID:1438325
 [1];  [2];  [1];  [2];  [2];  [3];  [4];  [5]
  1. Sorbonne Univ., Paris cedex (France)
  2. Raja Ramanna Centre for Advanced Technology, Indore (India)
  3. Brookhaven National Lab. (BNL), Upton, NY (United States)
  4. HORIBA Scientific, Palaiseau (France)
  5. Institut de Recherche de Chimie Paris (IRCP), Paris (France)
+ Show Author Affiliations
Here, we study a Au (25 nm)/Cr (10 nm) bilayer system as a model of mirror for the soft X–ray energy range. The Au and Cr thin films are a few nanometer thick and are deposited on a float glass substrate. The sample is characterized by using 3 complementary techniques: soft X–ray reflectivity, glow discharge optical emission spectrometry (GDOES), and time–of–flight secondary ion mass spectroscopy (ToF–SIMS). Soft X–ray reflectivity provides information about the thickness and roughness of the different layers, while GDOES is used to obtain the elemental depth profile of the stack and ToF–SIMS to obtain the elemental and chemical depth profiles. GDOES and ToF–SIMS have both a nanometer depth resolution. A coherent description of the bilayer stack is obtained through the combination of these techniques. It consists in 5 layers namely a surface contamination layer, a principal gold layer, a Au–Cr mixed layer, a Cr layer, and another contamination layer at the top of the substrate.
Research Organization:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Grant/Contract Number:
SC0012704
OSTI ID:
1438325
Report Number(s):
BNL--205686-2018-JAAM
Journal Information:
Surface and Interface Analysis, Journal Name: Surface and Interface Analysis Journal Issue: 11 Vol. 50; ISSN 0142-2421
Publisher:
WileyCopyright Statement
Country of Publication:
United States
Language:
English

References (6)

Nanometer-designed Al/SiC periodic multilayers: characterization by a multi-technique approach journal April 2010
Characterization of EUV periodic multilayers journal July 2011
Towards nanometric resolution in multilayer depth profiling: a comparative study of RBS, SIMS, XPS and GDOES journal January 2010
Interface observation of heat-treated Co/Mo2C multilayers journal March 2015
Sputter depth profiling of Mo/B4C/Si and Mo/Si multilayer nanostructures: A round-robin characterization by different techniques journal July 2013
Glow Discharge as a Tool for Surface and Interface Analysis journal July 2006

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Related Subjects

36 MATERIALS SCIENCE
GDOES
ToF‐SIMS
X‐ray mirro
X‐ray reflectivity
chromium
gold