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Large-Area Subwavelength Aperture Arrays Fabricated Using Nanoimprint Lithography

Journal Article · · IEEE Transactions on Nanotechnology
 [1];  [2];  [3];  [4];  [5]
  1. Berkeley Sensor and Actuator Center, Berkeley, CA (United States); Univ. of California, Davis, CA (United States). Department of Mechanical and Aeronautical Engineering; Sandia National Lab. (SNL-CA), Livermore, CA (United States)
  2. Sandia National Lab. (SNL-CA), Livermore, CA (United States); Xradia, Inc., Concord, CA (United States)
  3. Sandia National Lab. (SNL-CA), Livermore, CA (United States)
  4. Stanford Univ., CA (United States). Department of Electrical Engineering
  5. Berkeley Sensor and Actuator Center, Berkeley, CA (United States); Univ. of California, Davis, CA (United States). Department of Mechanical and Aeronautical Engineering
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In this paper, we report on the fabrication and characterization of large-area 2-D square arrays of subwavelength holes in Ag and Al films. Fabrication is based on thermal nanoimprint lithography and metal evaporation, without the need for etching, and is compatible with low-cost, large-scale production. Reflectance spectra for these arrays display an intensity minimum whose amplitude, center wavelength, and line width depend on the geometry of the array and the reflectivity of the metal film. By placing various fluids in contact with the subwavelength aperture arrays, we observe that the center wavelength of the reflectance minimum varies linearly with the refractive index of the fluid with a sensitivity of over 500 nm per refractive index unit. Lastly, the surface plasmon theory is used to predict sensitivities to refractive index change with accuracies better than 0.5%.
Research Organization:
Sandia National Laboratories (SNL-CA), Livermore, CA (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA); USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Grant/Contract Number:
AC04-94AL85000
OSTI ID:
1426959
Report Number(s):
SAND--2007-1398J; 526793
Journal Information:
IEEE Transactions on Nanotechnology, Journal Name: IEEE Transactions on Nanotechnology Journal Issue: 5 Vol. 7; ISSN 1536-125X
Publisher:
IEEECopyright Statement
Country of Publication:
United States
Language:
English

Cited By (3)

Dual Sensing Arrays for Surface Plasmon Resonance (SPR) and Surface-Enhanced Raman Scattering (SERS) Based on Nanowire/Nanorod Hybrid Nanostructures journal September 2018
Highly Sensitive Aluminum-Based Biosensors using Tailorable Fano Resonances in Capped Nanostructures journal March 2017
Plasmonic components fabrication via nanoimprint journal September 2009

Figures / Tables (4)

Fig. 1(p. 2)figure Fig. 1
Fig. 1(p. 2)figure Fig. 1
Fig. 2(p. 3)figure Fig. 2
Fig. 3(p. 3)figure Fig. 3

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Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
Nanoimprint lithography (NIL)
nanotechnology
refractive index measurement
subwavelength optics
surface plasmons (SPs)