Tunable Visibly Transparent Optics Derived from Porous Silicon

Ocier, Christian R.; Krueger, Neil A.; Zhou, Weijun; Braun, Paul V.

doi:10.1021/acsphotonics.6b01001

Title: Tunable Visibly Transparent Optics Derived from Porous Silicon

Journal Article · Tue Feb 28 00:00:00 EST 2017 · ACS Photonics

DOI:https://doi.org/10.1021/acsphotonics.6b01001· OSTI ID:1388287

Ocier, Christian R. ^[1]; Krueger, Neil A. ^[1]; Zhou, Weijun ^[2];

^[1]

Univ. of Illinois at Urbana-Champaign, IL (United States). Dept. of Materials Science and Engineering, Frederick Seitz Materials Research Lab.
The Dow Chemical Company, Freeport, TX (United States)

Visibly transparent porous silicon dioxide (PSiO₂) and PSiO₂/titanium dioxide (TiO₂) optical elements were fabricated by thermal oxidation, or a combination of thermal oxidation and atomic layer deposition infilling, of an electrochemically etched porous silicon (PSi) structure containing an electrochemically defined porosity profile. The thermally oxidized PSiO₂ structures are transparent at visible wavelengths and can be designed to have refractive indices ranging from 1.1 to 1.4. The refractive index can be increased above 2.0 through TiO₂ infilling of the pores. Applying this oxidation and TiO₂ infilling methodology enabled tuning of a distributed Bragg reflector (DBR) formed from PSi across the visible spectrum. At the maximum filling, the DBR exhibited a transmission of 2% at 620 nm. Simulations match well with measured spectra. In addition to forming DBR filters, phase-shaping gradient refractive index (GRIN) elements were formed. As a demonstration, a 4 mm diameter radial GRIN PSiO₂ element with a parabolic, lens-like phase profile with a calculated focal length of 1.48 m was formed. The calculated focal length was reduced to 0.80 m upon the addition of TiO₂. All the structures showed broad transparency in the visible and were stable to the materials conversion process.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Light-Material Interactions in Energy Conversion (LMI)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0001293

OSTI ID:: 1388287

Journal Information:: ACS Photonics, Vol. 4, Issue 4; Related Information: LMI partners with California Institute of Technology (lead); Harvard University; University of Illinois, Urbana-Champaign; Lawrence Berkeley National Laboratory; ISSN 2330-4022

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 24 works

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Title: Tunable Visibly Transparent Optics Derived from Porous Silicon

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