Resonant Mode Engineering of Photonic Crystal Sensors Clad with Ultralow Refractive Index Porous Silicon Dioxide

Wan, Yuhang; Krueger, Neil A.; Ocier, Christian R.; Su, Patrick; Braun, Paul V.; Cunningham, Brian T.

doi:10.1002/adom.201700605

Title: Resonant Mode Engineering of Photonic Crystal Sensors Clad with Ultralow Refractive Index Porous Silicon Dioxide

Journal Article · Fri Sep 01 00:00:00 EDT 2017 · Advanced Optical Materials

DOI:https://doi.org/10.1002/adom.201700605· OSTI ID:1470416

^[1]; Krueger, Neil A. ^[2]; Ocier, Christian R. ^[2]; Su, Patrick ^[3]; Braun, Paul V. ^[2]; Cunningham, Brian T. ^[4]

Univ. of Illinois at Urbana-Champaign, IL (United States). Dept. of Electrical and Computer Engineering; Beihang Univ., Beijing (China). School of Electronic and Information Engineering
Univ. of Illinois at Urbana-Champaign, IL (United States). Dept. of Materials Science and Engineering
Univ. of Illinois at Urbana-Champaign, IL (United States). Dept. of Electrical and Computer Engineering, Micro and Nanotechnology Lab.
Univ. of Illinois at Urbana-Champaign, IL (United States). Dept. of Electrical and Computer Engineering, Micro and Nanotechnology Lab., and Dept. of Bioengineering

Abstract Porous SiO ₂ (PSiO ₂ ) with ultralow refractive index ( n = 1.09) is incorporated as the cladding of a photonic crystal (PC) refractive index sensor with enhanced sensitivity through the establishment of resonant modes that principally reside in the liquid medium covering the PC surface. PSiO ₂ , obtained by thermal oxidation of porous Si that has been transferred to a transparent substrate, is transparent at visible and near infrared wavelengths with a refractive index determined by its porosity. The PSiO ₂ periodic grating structure (Λ = 590 nm) is patterned by nanoimprint lithography and reactive ion etching, then conformally coated by sputtering high refractive index TiO ₂ to seal the pores from liquid infiltration. With the refractive index of PSiO ₂ much lower than that of water, the resonant mode “flips” its spatial distribution from within the solid dielectric regions of the photonic crystal to reside mainly in the water media covering the PC, resulting in 4× greater resonant wavelength shift for a fixed refractive index change. This study demonstrates design, fabrication, and testing of the sensor as a refractometer, supported by electromagnetic simulations of the resonant mode spatial distribution, in which porous PC sensors are compared to nonporous PC sensors.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Light-Material Interactions in Energy Conversion (LMI)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0001293; DE‐SC0001293

OSTI ID:: 1470416

Alternate ID(s):: OSTI ID: 1378114

Journal Information:: Advanced Optical Materials, Vol. 5, Issue 21; Related Information: LMI partners with California Institute of Technology (lead); Harvard University; University of Illinois, Urbana-Champaign; Lawrence Berkeley National Laboratory; ISSN 2195-1071

Publisher:: WileyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 21 works

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Title: Resonant Mode Engineering of Photonic Crystal Sensors Clad with Ultralow Refractive Index Porous Silicon Dioxide

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