Porous Silicon Gradient Refractive Index Micro-Optics

Krueger, Neil A.; Holsteen, Aaron L.; Kang, Seung-Kyun; Ocier, Christian R.; Zhou, Weijun; Mensing, Glennys; Rogers, John A.; Brongersma, Mark L.; Braun, Paul V.

doi:10.1021/acs.nanolett.6b02939

Title: Porous Silicon Gradient Refractive Index Micro-Optics

Journal Article · Mon Nov 07 00:00:00 EST 2016 · Nano Letters

DOI:https://doi.org/10.1021/acs.nanolett.6b02939· OSTI ID:1388664

Krueger, Neil A. ^[1]; Holsteen, Aaron L. ^[2]; Kang, Seung-Kyun ^[1]; Ocier, Christian R. ^[1]; Zhou, Weijun ^[3]; Mensing, Glennys ^[4]; Rogers, John A. ^[1]; Brongersma, Mark L. ^[2]; Braun, Paul V. ^[1]

Univ. of Illinois at Urbana-Champaign, IL (United States). Beckman Inst. for Advanced Science and Technology
Stanford Univ., CA (United States). Geballe Lab. for Advanced Materials
Dow Chemical Co., Freeport, TX (United States)
Department of Mechanical Science and Engineering, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801, United States

We see the emergence and growth of transformation optics over the past decade has revitalized interest in how a gradient refractive index (GRIN) can be used to control light propagation. Two-dimensional demonstrations with lithographically defined silicon (Si) have displayed the power of GRIN optics and also represent a promising opportunity for integrating compact optical elements within Si photonic integrated circuits. Here, we demonstrate the fabrication of three-dimensional Si-based GRIN micro-optics through the shape-defined formation of porous Si (PSi). Conventional microfabrication creates Si square microcolumns (SMCs) that can be electrochemically etched into PSi elements with nanoscale porosity along the shape-defined etching pathway, which imparts the geometry with structural birefringence. Free-space characterization of the transmitted intensity distribution through a homogeneously etched PSi SMC exhibits polarization splitting behavior resembling that of dielectric metasurfaces that require considerably more laborious fabrication. Coupled birefringence/GRIN effects are studied by way of PSi SMCs etched with a linear (increasing from edge to center) GRIN profile. The transmitted intensity distribution shows polarization-selective focusing behavior with one polarization focused to a diffraction-limited spot and the orthogonal polarization focused into two laterally displaced foci. Optical thickness-based analysis readily predicts the experimentally observed phenomena, which strongly match finite-element electromagnetic simulations.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Light-Material Interactions in Energy Conversion (LMI)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0001293

OSTI ID:: 1388664

Journal Information:: Nano Letters, Vol. 16, Issue 12; Related Information: LMI partners with California Institute of Technology (lead); Harvard University; University of Illinois, Urbana-Champaign; Lawrence Berkeley National Laboratory; ISSN 1530-6984

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 22 works

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