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Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and water

Journal Article · · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
DOI:https://doi.org/10.1116/1.4812717· OSTI ID:1386552
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Research Organization:
Energy Frontier Research Centers (EFRC) (United States). Center on Nanostructuring for Efficient Energy Conversion (CNEEC)
Sponsoring Organization:
USDOE SC Office of Basic Energy Sciences (SC-22)
DOE Contract Number:
SC0001060
OSTI ID:
1386552
Journal Information:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Issue: 6 Vol. 31; ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

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