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Thin film characterization of zinc tin oxide deposited by thermal atomic layer deposition

Journal Article · · Thin Solid Films
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Research Organization:
Energy Frontier Research Centers (EFRC); Center on Nanostructuring for Efficient Energy Conversion (CNEEC)
Sponsoring Organization:
USDOE SC Office of Basic Energy Sciences (SC-22)
DOE Contract Number:
SC0001060
OSTI ID:
1161739
Journal Information:
Thin Solid Films, Journal Name: Thin Solid Films Vol. 556
Country of Publication:
United States
Language:
English

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